AV名湿

The Archive Below Contains Selected Publications from the AV名湿 Group with PDF Links.

499.听听听听 Janine D. Sempel, Marja-Leena Kaariainen, Troy A. Colleran, Alejo M. Lifschitz, and Steven M. George, 鈥淯ltrathin ZrO₂ Thickness Control on TiO₂/ZrO₂ Core/Shell Nanoparticles Using ZrO₂ Atomic Layer Deposition and Etching鈥�, J. Vac. Sci. Technol. A 42, 052604 (2024).

498.听听听听 Marcel Junige and Steven M. George, 鈥淪electivity Between SiO₂ and SiN_x During Thermal Atomic Layer Etching Using Al(CH₃)₃/HF and Spontaneous Etching Using HF and Effect of HF/NH₃ 颁辞-顿辞蝉颈苍驳鈥�, Chem. Mater. 36, 6950-6960 (2024).

497.听听听听 Jonathan L. Partridge, Aziz I. Abdulagatov, David R. Zywotko, and Steven M. George, 鈥淟imiting or Continuous Thermal Etching of First Row Transition Metal Oxides Using Acetylacetone and Ozone鈥�, Chem. Mater. 36, 7151-7161 (2024).

496.听听听听 Jonathan L. Partridge, Jessica A. Murdzek, Virginia L. Johnson, Andrew Cavanagh, Sandeep Sharma and Steven M. George, 鈥淭hermal Atomic Layer Etching of Gold Using Sulfuryl Chloride for Chlorination and Triethylphosphine for Ligand Addition鈥�, Chem. Mater. 36, 5149-5159 (2024).

495.听听听听 Brian C. Welch, Emma N. Antonio, Thomas P. Chaney, Olivia M. McIntee, Joseph Strzalka, Victor M. Bright, Alan R. Greenberg, Tamar Segal-Peretz, Michael Toney, and Steven M. George, 鈥淏uilding Semipermeable Films One Monomer at a Time: Structural Advantages via Molecular Layer Deposition vs Interfacial Polymerization鈥�, Chem. Mater. 36, 1362-1374 (2024).听

494.听听听听 Taewook Nam, Troy A. Colleran, Jonathan L. Partridge, Andrew S. Cavanagh, and Steven M. George, 鈥淭hermal Atomic Layer Etching of Molybdenum Using Sequential Oxidation and Deoxychlorination Reactions鈥�, Chem. Mater. 36, 1449-1458 (2024).

493.听听听听 Jack T. Widmer and Steven M. George, 鈥淎l₂O₃ Atomic Layer Deposition on a Porous Matrix of Carbon Fibers (FiberForm) for Oxidation Resistance鈥�, J. Vac. Sci. Technol. A 41, 062412 (2023).

492.听听听听 Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, Victor Wang, Andrew C. Kummel, and Steven M. George, 鈥淓lectron-Enhanced Atomic Layer Deposition of Ru Thin Films Using Ru(DMBD)(CO)₃ and Effect of Forming Gas Anneal鈥�, J. Vac. Sci. Technol. A 41, 062408 (2023).

491.听听听听 Taewook Nam, Jonathan L. Partridge, and Steven M. George, 鈥淭hermal Atomic Layer Etching of Zinc Sulfide Using Sequential Trimethylaluminum and HF Exposures:听 Evidence for a Conversion Mechanism鈥�, Chem. Mater. 35, 6671-6681 (2023).

490.听听听听 Jonathan L. Partridge, Aziz I. Abdulagatov, Varun Sharma, Jessica A. Murdzek, Andrew S. Cavanagh, and Steven M. George, 鈥淭hermal Atomic Layer Etching of CoO Using Acetylacetone and Ozone:听 Evidence for Changes in Oxidation State and Crystal Structure During Sequential Exposures鈥�, Appl. Surf. Sci. 638, 157923 (2023).

489.听听听听 Jonas C. Gertsch, Zachary C. Sobell, Andrew S. Cavanagh, Harsono Simka and Steven M. George, 鈥淓lectron-Enhanced SiO₂ Atomic Layer Deposition at 35掳C Using Disilane and Ozone or Water as Reactants鈥�, J. Vac. Sci. Technol. A 41, 043404 (2023).

488.听听听听 Behnam Moeini, Tahereh Avval, Hidde Brongersma, Stanislav Pr暖拧a, Pavel Ba虂bi虂k, Elena Vani虂c虒kova虂, Brian R Strohmeier, David S Bell, Dennis Eggett, Steven M George, Matthew R Linford, 鈥淎rea-Selective Atomic Layer Deposition of ZnO on Si/SiO₂ Using Tris(trimethylamino)methylsilane鈥�, Materials 16, 4688 (2023).

487.听听听听 Jessica A. Murdzek, Ann Lii-Rosales, and Steven M. George, 鈥淭hermal Atomic Layer Etching of Cobalt Using Sulfuryl Chloride for Chlorination and Tetramethylethylenediamine or Trimethylphosphine for Ligand Addition鈥�, J. Vac. Sci. Technol. A 41, 032603 (2023).听

486.听听听听 Jonathan L. Partridge, Jessica A. Murdzek, Virginia L. Johnson, Andrew S. Cavanagh, Andreas Fischer, Thorsten Lill, Sandeep Sharma, and Steven M. George, 鈥淭hermal Atomic Layer Etching of CoO, ZnO, Fe₂O₃, and NiO by Chlorination and Ligand Addition Using SO₂Cl₂ and Tetramethylethylenediamine鈥�, Chem. Mater. 35, 2058-2068 (2023).

485.听听听听 Jonas C. Gertsch, Jonathan L. Partridge, Austin M. Cano, Joel W. Clancey, Victor M. Bright, Steven M. George, 鈥淭hermal Atomic Layer Etching of VO₂ Using Sequential BCl₃ and SF₄ Exposures:听 Observation of Conversion, Ligand-Exchange, and Oxidation State Changes鈥�, J. Vac. Sci. Technol. A 41, 012603 (2023).

484.听听听听 Zachary C. Sobell and Steven M. George, 鈥淓lectron-Enhanced Atomic Layer Deposition of Titanium Nitride Films Using an Ammonia Reactive Background Gas鈥�, Chem. Mater. 34, 9624-9633 (2022).

483.听听听听 Ann Lii-Rosales, Virginia L. Johnson, Andrew S. Cavanagh, Andreas Fischer, Thorsten Lill, Sandeep Sharma, and Steven M. George, 鈥淓ffectiveness of Different Ligands on Silane Precursors for Ligand-Exchange to Etch Metal Fluorides鈥�, Chem. Mater. 34, 8641-8653 (2022).

482.听听听听 Austin M. Cano, Jonathan L. Partridge and Steven M. George,听 鈥�Thermal Atomic Layer Etching of Al₂O₃ Using Sequential HF and BCl₃ Exposures:听 Evidence for Combined Ligand-Exchange and Conversion Mechanisms鈥�, Chem. Mater. 34, 6440-6449 (2022).听

481.听听听听 Olivia M. McIntee, Brian C. Welch, Alan R. Greenberg, Steven M. George and Victor M. Bright, 鈥淓lastic Modulus of Polyamide Thin Films Formed by Molecular Layer Deposition鈥�, Polymer 255, 125167 (2022).

480.听听听听 Ann Lii-Rosales, Virginia L. Johnson, Sandeep Sharma, Andreas Fischer, Thorsten Lill, and Steven M. George, 鈥淰olatile Products from Spontaneous Etching of NiCl₂, PdCl₂ and PtCl₂ by Ligand Addition with P(CH₃)₃鈥�, J. Phys. Chem. C. 126, 8287-8295 (2022).

479.听听听听 Austin M. Cano, Ann Lii-Rosales and Steven M. George, 鈥淭hermal Atomic Layer Etching of Aluminum Nitride Using HF or XeF₂ for Fluorination and BCl₃ for Ligand Exchange鈥�, J. Phys. Chem. C. 126, 6990-6999 (2022).

478.听听听听 M. Hoffmann J. A. Murdzek, S. M. George, S. Slesazeck, U. Schroeder, and T. Mikolajick, 鈥淎tomic Layer Etching of Ferroelectric Hafnium Zirconium Oxide Thin Films Enables Giant Tunneling Electroresistance鈥�, Appl. Phys. Lett. 120, 122901 (2022).

477.听听听听 Austin M. Cano, Suresh Kondati Natarajan, Jonathan L. Partridge, Simon D. Elliot, and Steven M. George^{, 鈥�}Spontaneous Etching of B₂O₃ by HF Gas Studied Using Infrared Spectroscopy, Mass Spectrometry and Density Functional Theory鈥�, J. Vac. Sci. Technol. A 40, 022601 (2022).

476.听听听听 Jessica A. Murdzek, Ann Lii-Rosales, and Steven M. George, 鈥淭hermal Atomic Layer Etching of Nickel Using Sequential Chlorination and Ligand-Addition Reactions鈥�, Chem. Mater.听 33, 9174-9183 (2021).

475.听听听听 Suresh Kondati Natarajan, Austin M. Cano, Jonathan L. Partridge, Steven M. George and Simon D. Elliott, 鈥淧rediction and Validation of Process Window for Atomic Layer Etching:听 HF Exposure on TiO₂鈥�, J. Phys. Chem. C 125, 25589-25599 (2021).

474.听听听听 Jonas C. Gertsch, Emanuele Sortino, Victor M. Bright, and Steven M. George^, 鈥淒eposit and Etchback Approach for Ultrathin Al₂O₃ Films with Low Pinhole Density Using Atomic Layer Deposition and Atomic Layer Etching鈥�, J. Vac. Sci. Technol. A 39, 062602 (2021).

473.听听听听 Ann Lii-Rosales, Andrew S. Cavanagh, Andreas Fischer, Thorsten Lill and Steven M. George, 鈥淪pontaneous Etching of Metal Fluorides Using Ligand-Exchange Reactions: Landscape Revealed by Mass Spectrometry 鈥�, Chem. Mater. 33, 7719-7730 (2021).听

472.听听听听 Brian C. Welch, Olivia M. McIntee, Tyler J. Myers, Alan R. Greenberg, Victor M. Bright and Steven M. George, 鈥淢olecular Layer Deposition for the Fabrication of Desalination Membranes with Tunable Metrics鈥�, Desalination 520, 115334 (2021).

471.听听听听 S.M. George, "Thermal Atomic Layer Etching of Microelectronic Materials", Extended Abstract, IEEE Xplore, 5th IEEE Electron Devices Technology and Manufacturing Conference (EDTM), April 8-11, 2021.

470.听听听听 Tyler J. Myers, James A. Throckmorton, Rebecca A. Borrelli, Malcolm O鈥橲ullivan, Tukaram Hatwar and Steven M. George, 鈥淪moothing Surface Roughness Using Al₂O₃ Atomic Layer Deposition鈥�, Appl. Surf. Sci. 569, 150878 (2021).

469.听听听听 Tyler J. Myers and Steven M. George, 鈥淢olecular Layer Deposition of Nylon 2,6 Polyamide Polymer on Flat and Particle Substrates in an Isothermal Rotary Reactor鈥�, J. Vac. Sci. Technol. A. 39, 052405 (2021).

468.听听听听 Zachary C. Sobell, Andrew S. Cavanagh, David R. Boris, Scott G. Walton, and Steven M. George, 鈥淗ollow Cathode Plasma Electron Source for Low Temperature Deposition of Cobalt Films by Electron-Enhanced Atomic Layer Deposition鈥�, J. Vac. Sci. Technol. A. 39, 042403 (2021).

467.听听听听 Jessica A. Murdzek, Adarsh Rajashekhar, Raghuveer S. Makala, and Steven M. George, 鈥淭hermal Atomic Layer Etching of Amorphous and Crystalline Al₂O₃ 贵颈濒尘蝉鈥�, J. Vac. Sci. Technol. A. 39, 042602 (2021).

466.听听听听 Andreas Fischer, Aaron Routzahn, Steven M. George, Thorsten Lill, 鈥淭hermal Atomic Layer Etching: A Review鈥�, J. Vac. Sci. Technol. A. 39, 030801 (2021).

465.听听听听 Aziz I. Abdulagatov, Varun Sharma, Jessica A. Murdzek, Andrew S. Cavanagh, and Steven M. George, 鈥淭hermal Atomic Layer Etching of Germanium-Rich SiGe Using an Oxidation and 鈥淐onversion-Etch鈥� Mechanism鈥�, J. Vac. Sci. Technol. A 39, 022602 (2021).

464.听听听听 Marcel Junige and Steven M. George, 鈥淎rea-Selective Molecular Layer Deposition of Nylon 6,2 Polyamide:听 Growth on Carbon and Inhibition on Silica鈥�, J. Vac. Sci. Technol. A 39, 023204 (2021).

463.听听听听 T. J. Myers, A. M. Cano, D. K. Lancaster, J. W. Clancey and S. M. George, 鈥淐onversion Reactions in Atomic Layer Processing with Emphasis on ZnO Conversion to Al₂O₃ by Trimethylaluminum鈥�, J. Vac. Sci. Technol. A. 39, 021001 (2021)).

462.听听听听 Neha Mahuli, Andrew S. Cavanagh and Steven M. George, 鈥淎tomic Layer Deposition of Hafnium and Zirconium Oxyfluoride Thin 贵颈濒尘蝉鈥�, J. Vac. Sci. Technol. A. 39, 022403 (2021).

461.听听听听 David R. Zywotko, Omid Zandi, Jacques Faguet, Paul R. Abel and Steven M. George, 鈥淶rO₂ Monolayer as a Removable Etch Stop Layer for Thermal Al₂O₃ Atomic Layer Etching using Hydrogen Fluoride and Trimethylaluminum鈥�, Chem. Mater. 32, 10055-10065 (2020).

460.听听听听 Brian C. Welch, Olivia McIntee, Anand B. Ode, Bonnie B. McKenzie, Alan R. Greenberg, Victor M. Bright and Steven M. George, 鈥淐ontinuous Polymer Films Deposited on Top of Porous Substrates Using Plasma-Enhanced Atomic Layer Deposition and Molecular Layer Deposition鈥�, J. Vac. Sci. Technol. A 38, 052409 (2020).

459.听听听听 Younghee Lee, Nicholas R. Johnson and Steven M. George, 鈥淭hermal Atomic Layer Etching of Gallium Oxide Using Sequential Exposures of HF and Various Metal Precursors鈥�, Chem. Mater. 32, 5937-5948 (2020).

458.听 听听 Steven M. George, 鈥淢echanisms of Thermal Atomic Layer Etching鈥�, Acc. Chem. Res. 53, 1151-1160 (2020).

457.听听听听 Matthias J. Young, Nicholas M. Bedford, Angel Yanguas-Gil, Steven Letourneau, Matthew Coile, David J. Mandia,听 Bachir Aoun, Andrew S. Cavanagh, Steven M. George and Jeffrey W. Elam, "Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer Deposition", ACS Appl. Mater. & Interfaces 12, 22804-22814 (2020).

456.听听听听 G.N. Parsons, J.W. Elam, S.M. George, S. Haukka, H. Jeon, W.M.M. Kessels, M. Leskel盲, P. Poodt, M. Ritala and S.M. Rossnagel, 鈥淓rratum: History of Atomic Layer Deposition and its Relationship with the American Vacuum Society鈥� [J. Vac. Soc. Technol. A 31, 050818 (2013)]鈥�, J. Vac. Soc. Technol. A 38, 037001 (2020).

455.听听听听 Aziz I. Abdulagatov and Steven M. George, 鈥淭hermal Atomic Layer Etching of Silicon Nitride Using an Oxidation and 鈥淐onversion Etch鈥� Mechanism鈥�, J. Vac. Sci. Technol. A. 38, 022607 (2020).

454.听听听听 Jessica A. Murdzek and Steven M. George, 鈥淓ffect of Crystallinity on the Thermal Atomic Layer Etching of Hafnium Oxide, Zirconium Oxide and Hafnium Zirconium Oxide鈥�, J. Vac. Sci. Technol. A 38, 022608 (2020).

453.听听听听 Neha Mahuli, Andrew S. Cavanagh and Steven M. George, 鈥淎tomic Layer Deposition of Aluminum Oxyfluoride (AlO_xF_y) Thin Films with Tunable Stoichiometry鈥�, J. Vac. Sci. Technol. A 38, 022407 (2020).

452.听听听听 Andreas Fischer, Aaron Routzahn, Younghee Lee, Thorsten Lill and Steven M. George, 鈥淭hermal Etching of AlF₃ and Thermal Atomic Layer Etching of Al₂O₃鈥�, J. Vac. Sci. Technol. A. 38, 022603 (2020).

451.听听听听 Joel W. Clancey, Andrew S. Cavanagh, James E.T. Smith, Sandeep Sharma and Steven M. George, 鈥淰olatile Etch Species Produced During Thermal Al₂O₃ Atomic Layer Etching鈥�, J. Phys. Chem. C 124, 287-299 (2020).

450.听听听听 Jessica A. Murdzek and Steven M. George, 鈥淭hermal Atomic Layer Etching of Amorphous and Crystalline Hafnium Oxide, Zirconium Oxide, and Hafnium Zirconium Oxide鈥�, Proceedings of 2019 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), April 22-25, 2019, Hsinchu, Taiwan, IEEE Xplore Digital Library.

449.听听听听 Zachary C. Sobell, Andrew S. Cavanagh and Steven M. George, 鈥淕rowth of Cobalt Films at Room Temperature Using Sequential Exposures of Cobalt Tricarbonyl Nitrosyl and Low Energy Electrons鈥�, J. Vac. Sci. Technol. A 37, 060906 (2019).

448.听听听听 Cosima Hirschberg, Nikolaj S酶lvk忙r Jensen, Johan Boetker, Anders 脴stergaard Madsen, Tommi O. K盲盲ri盲inen, Marja-Leena K盲盲ri盲inen, Pekka Hoppu, Steven M. George, Matti Murtomaa, Changquan Calvin Sun, Jens Risbo and Jukka Rantanen, 鈥淚mproving Powder Characteristics by Surface Modification Using Atomic Layer Deposition鈥�, Org. Process Res. Dev. 23, 2362-2368 (2019).

447.听听听听 Younghee Lee and Steven M. George, 鈥淭hermal Atomic Layer Etching of Al₂O₃, HfO₂, and ZrO₂ Using Sequential Hydrogen Fluoride and Dimethylaluminum Chloride Exposures鈥�, J. Phys. Chem. C 123, 18455-18466 (2019).

446.听听听听 Nicholas R. Johnson, Jennifer K. Hite, Michael A. Mastro, and Charles. R. Eddy, Jr. and Steven M. George, 鈥淭hermal Atomic Layer Etching of Crystalline GaN Using Sequential Exposures of XeF₂ and BCl₃鈥�, Appl. Phys. Lett. 114, 243103 (2019).

445.听听听听 Wenjie Lu, Younghee Lee, Jonas C. Gertsch, Jessica A. Murdzek, Andrew S. Cavanagh, Lisa Kong, Jes煤s A. del Alamo, and Steven M. George, 鈥淚n situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multi-gate MOSFETs鈥�, Nano Lett. 19, 5159-5166 (2019).

444.听听听听 Jasmine M. Wallas, Brian C. Welch, Yikai Wang, Jun Liu, Simon E. Hafner, Rui Qiao, Taeho Yoon, Yang-Tse Cheng, Steven M. George and Chunmei Ban, 鈥淪patial Molecular Layer Deposition of Ultrathin Polyamide to Stabilize Silicon Anodes in Lithium-Ion Batteries鈥�, ACS Appl. Energy Mater. 2, 4135-4143 (2019).

443.听听听听 Austin M. Cano, Amy E. Marquardt, Jaime W. DuMont and Steven M. George, 鈥淓ffect of HF Pressure on Thermal Al₂O₃ Atomic Layer Etch Rates and Al₂O₃ 贵濒耻辞谤颈苍补迟颈辞苍鈥�, J. Phys. Chem. C 123, 10346-10355 (2019).

442.听听听听 Jonas C. Gertsch, Austin M. Cano, Victor M. Bright, and Steven M. George, 鈥淪F₄ as the Fluorination Reactant for Al₂O₃ and VO₂ Thermal Atomic Layer Etching鈥�, Chem. Mater. 31, 3624-3635 (2019).

441.听听听听 Wenjie Lu, Younghee Lee, Jessica Murdzek, Jonas Gertsch, Alon Vardi, Lisa Kong, Steven M. George, and Jes煤s A. del Alamo, 鈥淔irst Transistor Demonstration of Thermal Atomic Layer Etching: InGaAs FinFETs with sub-5 nm Fin-width Featuring in situ ALE-ALD鈥�, Extended Abstract for 2018 IEEE International Electron Devices Meeting (IEDM), Dec. 1-5, 2018, San Francisco, CA., pages 39.1.1-39.1.4.

440.听听听听 Aziz I. Abdulagatov and Steven M. George, 鈥淭hermal Atomic Layer Etching of Silicon Using O₂, HF and Al(CH₃)₃ as the Reactants鈥�, Chem. Mater. 30, 8465-8475 (2018).

439.听听听听 Younghee Lee and Steven M. George, 鈥淭hermal Atomic Layer Etching of HfO₂ Using HF for Fluorination and TiCl₄ for Ligand-Exchange鈥�, J. Vac. Sci. Technol. A 36, 061504 (2018).

438.听听听听 David R. Zywotko, Jacques Faguet and Steven M. George, 鈥淩apid Atomic Layer Etching of Al₂O₃ Using Sequential Exposures of Hydrogen Fluoride and Trimethylaluminum with No Purging鈥�, J. Vac. Sci. Technol. A 36, 061508 (2018).听

437.听听听听 Jasmine M. Wallas, Huaxing Sun, Matthias J. Young and Steven M. George, 鈥淓lectron-Decoupled Ion Transfer in Thin Film Sodium Manganese Oxide for Efficient Capacitive Deionization鈥�, J. Electrochem. Soc. 165, A1-A10 (2018).

436.听听听听 Jaclyn K. Sprenger, Huaxing Sun, Andrew S. Cavanagh, Alexana Roshko, Paul T. Blanchard and Steven M. George, 鈥淓lectron-Enhanced Atomic Layer Deposition (EE-ALD) of Boron Nitride Thin Films at Room Temperature and 100掳C鈥�, J. Phys. Chem. C 122, 9455-9464 (2018). 听

435.听听听听 Alexander S. Yersak, Kashish Sharma, Jasmine M. Wallas, Arrelaine A. Dameron, Xuemin Li, Yongan Yang, Katherine E. Hurst, Chunmei Ban, Robert C. Tenent and Steven M. George, 鈥淪patial Atomic Layer Deposition for Coating Flexible Porous Li-Ion Battery Electrodes鈥�, J. Vac. Sci. Technol. A 36, 01A123 (2018).

434.听听听听 Jaclyn K. Sprenger, Huaxing Sun, Andrew S. Cavanagh and Steven M. George, 鈥淓lectron-Enhanced Atomic Layer Deposition of Silicon Thin Films at Room Temperature鈥�, J. Vac. Sci. Technol. A 36, 01A118 (2018).

433.听听听听 D. J. Higgs, J. W. DuMont, K. Sharma and S. M. George, 鈥淪patial Molecular Layer Deposition of Polyamide Thin Films on Flexible Polymer Substrates Using a Rotating Cylinder Reactor鈥�, J. Vac. Sci. Technol. A 36, 01A117 (2018).

432.听 听 Jaana Hautala, Tommi K盲盲ri盲inen, Pekka Hoppu, Marianna Kemell, Jyrki Hein盲m盲ki, David Cameron, Steven George, Anne Mari Juppo, 鈥淎tomic Layer Deposition 鈥� A Novel Method for the Ultrathin Coating of Minitablets鈥�, Int. J. Pharm. 531, 47-58 (2017).

431.听听听听 Nicholas R. Johnson and Steven M. George, 鈥淲O₃ and W Thermal Atomic Layer Etching Using 鈥淐onversion-Fluorination鈥� and 鈥淥xidation-Conversion-Fluorination鈥� Mechanisms鈥� ACS Appl. Mater. Interfaces 9, 34435-34447 (2017).

430.听听听听 Younghee Lee and Steven M. George, 鈥淭hermal Atomic Layer Etching of Titanium Nitride Using Sequential, Self-Limiting Reactions:听 Oxidation to TiO₂ and Fluorination to Volatile TiF₄鈥�, Chem. Mater. 29, 8202-8210 (2017).

429.听听听听 Diane K. Lancaster, Huaxing Sun and Steven M. George, Atomic Layer Deposition of Zn(O,S) Alloys Using Diethylzinc with H₂O and H₂S: 听Effect of Exchange Reactions, J. Phys. Chem. C 121, 18643-18652 (2017).

428.听听听听 Tommi O. K盲盲ri盲inen, Marianna Kemell, Marko Vehkam盲ki, Marja-Leena K盲盲ri盲inen, Alexandra Correia, H茅lder A. Santos, Luis M. Bimbo, Jouni Hirvonen, Pekka Hoppu, Steven M. George, David C. Cameron, Mikko Ritala, Markku Leskel盲, 鈥淪urface Modification of Acetaminophen Particles by Atomic Layer Deposition鈥�,听 Int. J. Pharm. 525, 160-174 (2017).

427.听听听听 K. Ishikawa, K. Karahashi, M. Honda, M. Matsui, J.P. Chang, S.M. George, W.M.M. Kessels, H.J. Lee, S. Tinck, J.H. Um, T. Tatsumi, S. Higashi and K. Kinoshita, 鈥淧rogress and Prospects in Nanoscale Dry Processes - How Can We Control Atomic Layer Reactions?鈥�, Jpn. J. Appl. Phys. 56, 06HA02 (2017).

426.听听听听 Yun Zhou, Younghee Lee, Huaxing Sun, Jasmine M. Wallas, Steven M. George and Ming Xie, 鈥淐oating Solution for High-Voltage Cathode:听 AlF₃ Atomic Layer Deposition for Free-standing LiCoO₂ Electrodes with High Energy Density and Excellent Flexibility鈥�, ACS Appl. Mater. Interfaces 9, 9614-9619 (2017).

425.听听听听 Jaime W. DuMont, Amy E. Marquardt, Austin M. Cano and Steven M. George, 鈥淭hermal Atomic Layer Etching of SiO₂ by a 鈥淐onversion-Etch鈥� Mechanism Using Sequential Reactions of Trimethylaluminum and Hydrogen Fluoride鈥�, ACS Appl. Mater. & Interfaces 9, 10296-10307 (2017).

424.听听听听 David R. Zywotko and Steven M. George, 鈥淭hermal Atomic Layer Etching of ZnO by a 鈥淐onversion-Etch鈥� Mechanism Using Sequential Exposures of Hydrogen Fluoride and Trimethylaluminum鈥�, Chem. Mater. 29, 1183-1191 (2017).

423.听听听听 Jaime W. DuMont and Steven M. George, 鈥淐ompetition between Al₂O₃ Atomic Layer Etching and AlF₃ Atomic Layer Deposition Using Sequential Exposures of HF and Trimethylaluminum鈥�, J. Chem. Phys. 146, 052819 (2017).

422.听听听听 Matthias J. Young, Hans-Dieter Schnabel, Aaron M. Holder, Steven M. George and Charles B. Musgrave, 鈥淏and-Diagram and Rate Analysis of Thin-Film Spinel LiMn₂O₄ Formed by Electrochemical Conversion of ALD Grown Mn翱鈥�, Adv. Funct. Mater. 26, 7895-7907 (2016).

421.听听听听 Younghee Lee, Craig Huffman and Steven M. George, 鈥淪electivity in Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions鈥�, Chem. Mater. 28, 7657-7665 (2016).

420.听听听听 Jaclyn K. Sprenger, Andrew S. Cavanagh, Huaxing Sun, Kathryn J. Wahl, Alexana Roshko and Steven M. George, 鈥淓lectron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100掳C Using Sequential Surface Reactions鈥�, Chem. Mater. 28, 5282-5294 (2016).

419.听听听听 Matthias J. Young, Christopher D. Hare, Andrew C. Cavanagh, Charles B. Musgrave and Steven M. George, 鈥淩apid Growth of Crystalline Mn₅O₈ by Self-Limited Multilayer Deposition using Mn(EtCp)₂ and O₃", ACS Appl. Mater. Interfaces 8, 18560-18569 (2016).

418.听听听听 Chunmei Ban and Steven M. George, 鈥淢olecular Layer Deposition for Surface Modification of Lithium-Ion Battery Electrodes鈥�, Adv. Mater. Interfaces 3, 1600762 (2016).

417.听听听听 Nicholas R. Johnson, Huaxing Sun, Kashish Sharma and Steven M. George, 鈥淭hermal Atomic Layer Etching of Crystalline Aluminum Nitride Using Sequential, Self-Limiting HF and Sn(acac)₂ Reactions and Enhancement by H₂ and Ar Plasmas鈥�, J. Vac. Sci. Technol. A 34, 050603 (2016).

416.听听听听 Daniela Molina Piper, Younghee Lee, Seoung-Bum Son, Tyler Evans, Feng Lin, Dennis Nordlund, Xingcheng Xiao, Steven M. George, Se-Hee Lee, Chunmei Ban, 鈥淐ross-linked aluminum dioxybenzene coating for stabilization of silicon electrodes鈥�, Nano Energy 22, 202-210 (2016).

415.听听听听 Steven M. George and Younghee Lee, 鈥淧rospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reaction鈥�, ACS Nano 10, 4889-4894 (2016).

414.听听听听 Younghee Lee, Jaime W. DuMont and Steven M. George, 鈥淭rimethylaluminum as the Metal Precursor for the Atomic Layer Etching of Al₂O₃ Using Sequential, Self-Limiting Thermal Reactions鈥�, Chem. Mater. 28, 2994-3003 (2016).

413.听听听听 Younghee Lee, Huaxing Sun, Matthias J. Young and Steven M. George, 鈥淎tomic Layer Deposition of Metal Fluorides Using HF-Pyridine as the Fluorine Precursor鈥�, Chem. Mater. 28, 2022-2032 (2016).

412.听听听听 Ming Xie, Xiang Sun, Hongtao Sun, Tim Porcelli, Steven M. George, Yun Zhou and Jie Lian, 鈥淪tabilizing an Amorphous V₂O₅/Carbon Nanotube Paper Electrode with Conformal TiO₂ Coating by Atomic Layer Deposition for Lithium Ion Batteries鈥�, J. Mater. Chem. A 4, 537-544 (2016).

411.听听听听 Kashish Sharma, Dmitri Routkevitch, Natalia Varaksa and Steven M. George, 鈥淪patial Atomic Layer Deposition on Flexible Porous Substrates:听 ZnO on Anodic Aluminum Oxide Films and Al₂O₃ on Li Ion Battery Electrodes鈥�, J. Vac. Sci. Technol. A 34, 01A146 (2016).

410.听听听听 Ming Xie, Xiang Sun, Changgong Zhou, Hongtao Sun, Tao Hu, Jie Lian and Steven M. George, 鈥淎morphous Ultrathin SnO₂ Films by Atomic Layer Deposition on Graphene Network as Highly Stable Anodes for Lithium Ion Batteries鈥�, ACS Appl. Mater. Interfaces 7, 27735-27742 (2015).

409.听听听听 Matthias J. Young, Markus Neuber, Andrew C. Cavanagh, Huaxing Sun, Charles B. Musgrave and Steven M. George, 鈥淪odium Charge Storage in Thin Films of MnO₂ Derived by Electrochemical Oxidation of MnO Atomic Layer Deposition 贵颈濒尘蝉鈥�, J Electrochem. Soc. 162, A2753-A2761 (2015).听

408.听听听听 Nathan T. Eigenfeld, Jonas C. Gertsch, George D. Skidmore, Steven M. George, Victor M. Bright, 鈥淓lectrical and Thermal Conductivity in Ultra-Thin Freestanding Atom Layer Deposited W Nanobridges鈥�, Nanoscale 7, 17923-17928 (2015).

407.听听听听 Anna M. Wise, Chunmei Ban, Johanna Nelson Weker, Sumohan Misra, Andrew S. Cavanagh, Zhuangchun Wu, Zheng Li, M. Stanley Whittingham, Kang Xu, Steven M. George and and Michael F. Toney, 鈥淓ffect of Al₂O₃ Coating on Stabilizing LiNi₀.₄Mn_0.4Co_0.2O₂ 颁补迟丑辞诲别蝉鈥�, Chem. Mater. 27, 6146-6154 (2015).听

406.听听听听 Younghee Lee, Jaime W. DuMont and Steven M. George, 鈥淎tomic Layer Etching of AlF₃ Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)₂ and Hydrogen Fluoride鈥� J. Phys. Chem. C 119, 25385-25393 (2015).

405.听听听听 Y. Lee, J.W. DuMont, and S.M. George, 鈥淎tomic Layer Etching Using Thermal Reactions:听 Atomic Layer Deposition in Reverse鈥� ECS Transactions 69 (7) 233-241 (2015).

404.听听听听 Langli Luo, Hui Yang, Pengfei Yan, Jonathan J. Travis, Younghee Lee, Nian Liu, Daniela Molina Piper, Se-Hee Lee, Peng Zhao, Steven M. George, Ji-Guang Zhang, Yi Cui, Sulin Zhang, Chunmei Ban, and Chong-Min Wang, 鈥淪urface-Coating Regulated Lithiation Kinetics and Degradation in Silicon Nanowires for Lithium Ion Battery鈥�, ACS Nano 9, 5559-5566 (2015).

403.听听听听 Yuguang Ma, Julibeth M. Martinez de la Hoz, Ivette Angarita, Jose M. Berrio-Sanchez, Laura Benitez, Jorge M. Seminario, Seoung-Bum Son, Se-Hee Lee, Steven M. George, Chunmei Ban, and Perla B. Balbuena, 鈥淪tructure and Reactivity of Alucone-Coated Films on Si and Li_xSi_y 厂耻谤蹿补肠别蝉鈥�, ACS Appl. Mater. Interfaces 7, 11948-11955 (2015).

402.听听听听 Younghee Lee, Jaime W. DuMont, Andrew S. Cavanagh, and Steven M. George, 鈥淎tomic Layer Deposition of AlF₃ Using Trimethylaluminum and Hydrogen Fluoride鈥�, J. Phys. Chem. C. 119, 14185-14194 (2015).

401.听听听听 Matthias J. Young, Charles B. Musgrave, and Steven M. George, 鈥淕rowth and Characterization of Al₂O₃ Atomic Layer Deposition Films on sp²-Graphitic Carbon Substrates Using NO₂/Trimethylaluminum Pretreatment鈥�, ACS Appl. Mater. Interfaces 7, 12030-12037 (2015).

400.听听听听 Younghee Lee, Jaime W. DuMont and Steven M. George, 鈥淢echanism of Thermal Al₂O₃ Atomic Layer Etching Using Sequential Reactions with Sn(acac)₂ and HF鈥� Chem. Mater. 27, 3648-3657 (2015).

399.听听听听 Younghee Lee, Jaime W. DuMont and Steven M. George, 鈥淎tomic Layer Etching of HfO₂ Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)₂ and HF鈥�, ECS J. Solid State Sci. Technol. 4, N5013-N5022 (2015).

398.听听听听 Younghee Lee and Steven M. George, 鈥淎tomic Layer Etching of Al₂O₃ Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)₂ and HF鈥�, ACS Nano 9, 2061-2070 (2015).

397.听听听听 Jaime W. DuMont and Steven M. George, 鈥淧yrolysis of Alucone Molecular Layer Deposition Films Using In Situ Transmission Fourier Transform Infrared Spectroscopy鈥�, J. Phys. Chem. C. 119, 14603-14612 (2015).

396.听听听听 Jae Ha Woo, Jonathan J. Travis, Steven M. George, and Se-Hee Lee, 鈥淯tilization of Al₂O₃ Atomic Layer Deposition for Li Ion Pathways in Solid State Li Batteries鈥�, J. Electrochem. Soc. 162, A1-A6 (2015).

395.听听听听 Daniela Molina Piper, Seoung-Bum Son, Jonathan J Travis, Younghee Lee, Sang Sub Han, Seul Cham Kim, Kyu Hwan Oh, Steven M George, Se-Hee Lee, and Chunmei Ban, 鈥淢itigating Irreversible Capacity Losses from Carbon Agents via Surface Modification鈥�, J. Power Sources 275, 605-611 (2015).听

394.听听听听 Ming Xie, Daniela M. Piper, Miao Tian, Joel Clancey, Steven M. George, Sehee Lee and Yun Zhou, "Doped Si Nanoparticles with Conformal Carbon Coating and Cyclized-polyacrylonitrile Network as High-capacity and High-rate Lithium-ion Battery Anodes", Nanotechnology 26, 365401 (2015).

393.听听听听 J. W. Clancey, A. S. Cavanagh, R. S. Kukreja, A. Kongkanand and S. M. George, 鈥淎tomic Layer Deposition (ALD) of Ultrathin Platinum Films on Tungsten ALD Adhesion Layers: Application to High Surface Area Substrates鈥�, J. Vac. Sci. Technol. A. 33, 01A130 (2015).听

392.听听听听 K. Sharma, R.A. Hall and S.M. George, 鈥淪patial Atomic Layer Deposition on Flexible Substrates Using a Modular Rotating Cylinder Reactor鈥�, J. Vac. Sci. Technol. A. 33, 01A132 (2015).

391.听听听听 Ming Xie, Xiang Sun, 听Changgong Zhou,听 Andrew S. Cavanagh,听 Hongtao Sun,听 Tao Hu, Gongkai Wang,听 Jie Lian and Steven M. George, 鈥淎morphous Ultrathin TiO₂ Atomic Layer Deposition Films on Carbon Nanotubes as Anodes for Lithium Ion Batteries鈥�, J. Electrochem. Soc. 162, A974-A981 (2015).听

390.听听听听 Matthias J. Young, Aaron M. Holder, Steven M. George and Charles B. Musgrave, 鈥淐harge Storage in Cation Incorporated 伪-MnO₂鈥�, Chem. Mater. 27, 1172-1180 (2015).

389.听听听听 Erika Biserni, Ming Xie, Rosaria Brescia, Alice Scarpellini; Mazdak Hashempour; Pooria Movahed; Steven M. George, Massimiliano Bestetti, Andrea Li Bassi, Paola Bruno, 鈥淪ilicon Algae with Carbon Topping as Thin-film Anodes for Lithium-ion Microbatteries by a Two-step facile Method鈥�, J. Power Sources 274, 252-259 (2015).

388.听听听听 Xiang Sun, Changgong Zhou, Ming Xie, Tao Hu, Hongtao Sun, Guoqing Xin, Gongkai Wang, Steven M. George and Jie Lian, 鈥淎morphous Vanadium Oxide with Graphene by Atomic Layer Deposition for Stable High Energy Lithium Ion Anodes鈥�, Chem. Commun. 50, 10703-10706 (2014).听

387.听听听听 Byoung H. Lee, Virginia R. Anderson, and Steven M. George, 鈥淕rowth and Properties of Hafnicone and HfO₂/Hafnicone Nanolaminate and Alloy Films Using Molecular Layer Deposition Techniques鈥�, ACS Appl. Mater. Interfaces 6, 16880-16887 (2014).

386.听听听听 Robert A. Hall, Steven M. George, Yeongae Kim, Woonbong Hwang, Meghan E. Sambert, Nancy A. Monteiro-Riviere, and Roger J. Narayan, 鈥淕rowth of Zircone on Nanoporous Alumina Using Molecular Layer Deposition鈥�, JOM 66 (4), 649-653 (2014).

385.听听听听 S.M. George, 鈥淎tomic Layer Deposition of Ultrathin and Continuous Metal 贵颈濒尘蝉鈥�, in Proceedings of the 2014 IEEE International Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC), May 20-23, 2014, San Jose, California, pages 325-326.

384.听听听听 Daniel J. Higgs, Matthias J. Young, Jacob A. Bertrand and Steven M. George, 鈥淥xidation Kinetics of Calcium Films by Water Vapor and Their Effect on Water Vapor Transmission Rate Measurements鈥�, J. Phys. Chem. C. 118, 29322-29332 (2014).

383.听听听听 Joel Weber, Paul Blanchard, Aric Sanders, Jonas Gertsch, Steven George, Samuel Berweger, Atif Imtiaz, Kevin Coakley, Thomas Wallis, Kris Bertness, Pavel Kabos, Norman Sanford, Victor Bright, 鈥淕aN Nanowire Coated with Atomic Layer Deposition of Tungsten: A Probe for Near-Field Scanning Microwave Microscopy", Nanotechnology 25, 415502 (2014).

382.听听听听 Tao Hu, Ming Xie, Jing Zhong, Hong-tao Sun, Xiang Sun, Spencer Scott, Steven M. George, Chang-sheng Liu and Jie Lian, 鈥淧orous Fe₂O₃ Nanorods Anchored on Nitrogen-Doped Graphenes and Ultrathin Atomic Layer Deposition Coating for Long-Lived Lithium Ion Battery Anode鈥�, Carbon 76, 141-147 (2014).

381.听听听听 Virginia R. Anderson, Noemi Leick, Joel W. Clancey, Katherine E. Hurst, Kim M. Jones, Anne C. Dillon and Steven M. George, 鈥� Atomic Layer Deposition of Platinum Nanoparticles on Titanium Oxide and Tungsten Oxide Using Platinum(II) Hexafluoroacethylacetonate and Formalin as the Reactants鈥�, J. Phys. Chem. C 118, 8960-8970 (2014).

380.听听听听 Nathan T. Eigenfeld, Jason M. Gray, Joseph J. Brown, George D. Skidmore, Steven M. George and Victor M. Bright, 鈥淯ltra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide鈥�, Adv. Mater. 26, 3962-3967 (2014).

379.听听听听 Jason M. Gray, John P. Houlton, Jonas C. Gertsch, Joseph J. Brown, Charles T. Rogers, Steven M. George and Victor M. Bright, 鈥淗emispherical Micro-Resonators from Atomic Layer Deposition", J. Micromech. Microeng. 24, 125028 (2014).

378.听听听听 Yang He, Daniela Molina Piper, Meng Gu, Jonathan J. Travis, Steven M. George, Se-Hee Lee, Arda Genc, Lee Pullan, Jun Liu, Scott X. Mao Ji-Guang Zhang, Chunmei Ban and Chongmin Wang, "In Situ Transmission Electron Microscopy Probing of Native Oxide and Artificial Layer on Silicon Nanoparticles for Lithium Ion Battery", ACS Nano 8, 11816-11823 (2014).

377.听听听听 Xiang Sun, Changgong Zhou, Ming Xie, Hongtao Sun, Tao Hu, Fengyuan Lu, Spencer M. Scott, Steven M. George, Jie Lian, 鈥淪ynthesis of ZnO Quantum Dots/Graphene Nanocomposites by Atomic Layer Deposition with High Lithium Storage Capacity鈥�, J. Mater. Chem. A 2, 7319-7326 (2014).

376.听听听听 J.W. Kim, J.J. Travis, E.Y. Hu, K.W. Nam, S.C. Kim, C.S. Kang, J.H. Woo, X.Q. Yang, S.M. George, K.H. Oh, S.J. Cho and S.H. Lee, 鈥淯nexpected High Power Performance of Atomic Layer Deposition Coated Li[Ni_1/3Mn_1/3Co_1/3]O₂ 颁补迟丑辞诲别蝉鈥�,听 J. Power Sources 254, 190-197 (2014).听

375.听听听听 Virginia R. Anderson, Andrew S. Cavanagh, Aziz I. Abdulagatov, Zachary M. Gibbs and Steven M. George, 鈥淲aterless TiO₂ Atomic Layer Deposition Using Titanium Tetrachloride and Titanium Tetraisopropoxide鈥�,听 J. Vac. Sci. Technol. A. 32, 01A114-1 (2014).

374.听听听听 D.M. Piper, J.J. Travis, M.J. Young, S.B. Son, S.C. Kim, K.H. Oh, S.M. George, C.M. Ban and S.H. Lee, 鈥淩eversible High-Capacity Si Nanocomposite Anodes for Lithium Ion Batteries Enabled by Molecular Layer Deposition鈥�, Adv. Mater. 26, 1596-1601 (2014).听

373.听听听听 S.H. Woo, H. W. Lim, S.B. Jeon, J.J. Travis, S.M. George, S.H. Lee, Y.N. Jo, J.H. Song, Y.S. Jung, S.Y Hong, N.S. Choi and K.T. Lee, 鈥淚on-Exchangeable Functional Binders and Separator for High Temperature Performance of Li_1.1Mn_1.86Mg_0.04O₄ Spinel Electrodes in Lithium Ion Batteries鈥�, J. Electrochem. Soc. 160, A2234-A2243 (2013).听

372.听听听听 Jun Liu, Byunghoon Yoon, Eli Kuhlmann, Miao Tian, Jie Zhu, Steven M. George, Yung-Cheng Lee and Ronggui Yang, 鈥淯ltra-Low Thermal Conductivity of Atomic/Molecular Layer-Deposited Hybrid Organic-Inorganic Zincone Thin 贵颈濒尘蝉鈥�, Nano Lett. 13, 5594-5599 (2013).

371.听听听听 A.S. Cavanagh, L. Baker, J.W. Clancey, J. Yin, A. Kongkanand. F.T. Wagner and S.M. George, 鈥淚n Situ Characterization of Plasma-Assisted Pt ALD on W ALD Adhesion Layers with Spectroscopic Ellipsometry鈥�, ECS Transactions 58(10), 19-26 (2013).

370.听听听听 Dali Shao, Xiang Sun, Ming Xie, Mingpeng Yu, Steven M. George, Jie Lian and Shayla Sawyer, 鈥淶nO Quantum Dots-Graphene Composite for Efficient Ultraviolet Sensing鈥�, Mater. Lett. 112, 165-168 (2013).

369.听听听听 Daniel J. Higgs, Matthias J. Young, Jacob A. Bertrand, and Steven M. George, 鈥淣ew Calcium Test to Determine Water Vapor Transmission Rates Based on Quartz Crystal Microbalance Measurements鈥�, 56^th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Providence, RI, April 20-25, 2013, pages 446-450.

368.听听听听 Xiang Sun, Ming Xie, , Gongkai Wang, Hongtao Sun, Jie Lian and Steven M. George^, 鈥淧seudocapacitance of Amorphous TiO₂ Thin Films Anchored to Graphene and Carbon Nanotubes using Atomic Layer Deposition鈥�, J. Phys. Chem. C. 117, 22497-22508 (2013).听

367.听听听听 Xianming Dai, Mehdi Famouri, Aziz I. Abdulagatov, Ronggui Yang, Yung-Cheng Lee, Steven M. George and Chen Li, 鈥淐apillary Evaporation on Micromembrane-Enhanced Microchannel Wicks with Atomic Layer Deposited Silica鈥�, Appl. Phys. Lett. 103, 151602 (2013).

366.听听听听 Aziz I. Abdulagatov, Kalvis E. Terauds, Jonathan J. Travis, Andrew S. Cavanagh, Rishi Raj and Steven M. George, 鈥淧yrolysis of Titanicone Molecular Layer Deposition Films as Precursors for Conducting TiO₂/Carbon Composite 贵颈濒尘蝉鈥�, J. Phys. Chem. C. 117, 17442-17450 (2013).

365.听听听听 J.A. Bertrand, D.J. Higgs, M.J. Young and S.M. George, 鈥淗₂O Transmission Rate Through Polyethylene Naphthalate Polymer Using the Electrical Ca Test鈥�, J. Phys. Chem. A 117, 12026-12034 (2013).听

364.听听听听 J.J. Brown, R.A. Hall, P.E. Kladitis, S.M. George and V.M. Bright, 鈥淢olecular Layer Deposition on Carbon Nanotubes鈥�, ACS Nano 7, 7812-7823 (2013).

363.听听听听 G.N. Parsons, J.W. Elam, S.M. George, S. Haukka, H. Jeon, W.M.M. Kessels, M. Leskel盲, P. Poodt, M. Ritala and S.M. Rossnagel, 鈥淗istory of Atomic Layer Deposition and its Relationship with the American Vacuum Society鈥�, J. Vac. Soc. Technol. A 31, 050818 (2013).

362.听听听听 Prakash Periasamy, Harvey L. Guthrey, Aziz I. Abdulagatov, Paul F Ndione, Joseph J. Berry, David S. Ginley, Steven M. George, Philip A. Parilla and Ryan P. O鈥橦ayre, 鈥淢etal-Insulator-Metal Diodes:听 Role of the Insulator Layer on the Rectification Performance鈥�, Adv. Mater. 25, 1301-1308 (2013).

361.听听听听 Chunmei Ban, Ming Xie, Xiang Sun, , Gongkai Wang, Hongtao Sun, Anne C. Dillon, Jie Lian and Steven M. George, 鈥淎tomic Layer Deposition of Amorphous TiO₂ on an Al₂O₃ Adhesion Layer on Graphene as an Anode for Li Ion Batteries鈥�, Nanotechnology 24, 424002 (2013).

360.听听听听 Byoung H. Lee, Virginia R. Anderson and Steven M. George, 鈥淢olecular Layer Deposition of Zircone and ZrO₂/Zircone Alloy Films:听 Growth & Properties鈥�, Chem. Vapor Deposition 19, 204-212 (2013).

359.听听听听 Yoon Seok Jung, Peng Lu, Andrew S. Cavanagh, Chunmei Ban, Gi-Heon Kim, Se-Hee Lee, Steven M. George, Stephen J. Harris and Anne C. Dillon, 鈥淯nexpected Improved Performance of ALD Coated LiCoO₂/Graphite Li-ion Batteries鈥�, Adv. Energy Mater. 3, 213-219 (2013).

358.听听听听 Shih-Hui Jen, Steven M. George, Robert S. McLean and Peter F. Carcia, 鈥淎lucone Interlayers to Minimize Stress Caused by Thermal Expansion Mismatch between Al₂O₃ Films and Teflon Substrates鈥�, ACS Appl. Mater. Interfaces 5, 1165-1173 (2013).

357.听听听听 J.A. Bertrand and S.M. George, 鈥淓valuating Al₂O₃ Gas Diffusion Barriers Grown Directly on Ca Films Using Atomic Layer Deposition Techniques鈥�, J. Vac. Sci. Technol. A 31, 01A122 (2013).

356.听听听听 B.H. Lee, B.Yoon, A.I. Abdulagatov, R.A. Hall and S.M. George, 鈥淕rowth and Properties of Hybrid Organic-Inorganic Metalcone Films Using Molecular Layer Deposition Techniques鈥�, Invited Feature Article, Adv. Funct. Mater. 23, 532-546 (2013).听

355.听听听听 W.K. Warburton, Wolfgang Hennig, Jacob A. Bertrand, Steven M. George and Steven Biegalski, 鈥淎tomic Layer Deposition a-Al₂O₃ Diffusion Barriers to Eliminate the Memory Effect in Beta-gamma Radioxenon Detectors鈥�, J. Radioanal. Nucl. Chem. 296, 541-549 (2013).

354.听听听听 L. Baker, A.S. Cavanagh, J. Yin, S.M. George, A. Kongkanand and F.T. Wagner, "Growth of Continuous and Ultrathin Platinum Films on Tungsten Adhesion Layers Using Atomic Layer Deposition Techniques", Appl. Phys. Lett. 101, 111601 (2012).

353.听听听听 Byunghoon Yoon, Byoung H. Lee and Steven M. George, 鈥淗ighly Conductive and Transparent Hybrid Organic-Inorganic Zincone Thin Films Using Atomic and Molecular Layer Deposition鈥�, J. Phys. Chem.C 116, 24784-24791 (2012).

352.听听听听 J.A. Bertrand D.J. Higgs and S.M. George, CVD-Ca Test, 鈥淲ater Vapor Transmission Rates for Ultrabarriers on Polymers Grown Using Atomic Layer Deposition:听 Polymer Effects鈥�, 55^th Annual Technical Conference Proceedings, Society of Vacuum Coaters (SVC), 2012.听

351.听听听听 S.M. George, B.H. Lee, B. Yoon, A.I. Abdulagatov and R.A. Hall, 鈥淢etalcones:听 Hybrid Organic-Inorganic Films Fabricated Using Atomic and Molecular Layer Deposition Techniques鈥�, 55^th Annual Technical Conference Proceedings, Society of Vacuum Coaters (SVC), 2012.听

350.听听听听 Y.S. Jung, A.S. Cavanagh, L. Gedvilas, N.E. Widjonarko, I.D. Scott, S.H. Lee, G.H. Kim, S.M. George and A.C. Dillon, 鈥淚mproved Functionality of Lithium-Ion Batteries Enabled by Atomic Layer Deposition on the Porous Microstructure of Polymer Separators and Coating Electrodes鈥�, Adv. Energy Mater. 2, 1022-1027 (2012).听

349.听听听听 P.T. Blanchard, K.A. Bertness, T.E. Harvey, A.W. Sanders, N.A. Sanford, S.M. George, D. Seghete, 鈥淢OSFETs Made from GaN Nanowires with Fully Conformal Cylindrical Gates鈥�, IEEE Trans. Nanotechnology 11, 479-482 (2012).

348.听听听听 Jae Ha Woo, James E. Trevey, Andrew S. Cavanagh, Yong Seok Choi, Seul Cham Kim, Steven M. George, Kyu-Hwan Oh, and Se-Hee Lee, 鈥淣anoscale Interface Modification of LiCoO₂ by Al₂O₃ Atomic Layer Deposition for Solid-State Li Batteries, J. Electrochem. Soc. 159, A1120-A1124 (2012).

347.听听听听 Shih-Hui Jen, Byoung H. Lee, Steven M. George, Robert S. McLean and Peter F. Carcia, 鈥�Critical Tensile Strain and Water Vapor Transmission Rate for Alloy Films Grown Using Al₂O₃ Atomic Layer Deposition and Alucone Molecular Layer Deposition鈥�, Appl. Phys. Lett. 101, 234103 (2012).

346.听听听听 A.I. Abdulagatov, R.A. Hall, J.L. Sutherland_, B.H. Lee, A.S. Cavanagh and S.M. George, 鈥淢olecular Layer Deposition of Titanicone Films using TiCl₄ and Ethylene Glycol or Glycerol:听 Growth and Properties鈥�, Chem. Mater. 24, 2854-2863 (2012).

345.听听听听 W. Wang, M. Tian, A.I. Abdulagatov, S.M. George, Y.C. Lee and R.G. Yang, 鈥淭hree-Dimensional Ni/TiO₂ Nanowire Network for High Areal Capacity Lithium-Ion Microbattery Applications鈥�, Nano Letters 12, 655-660 (2012).

344.听听听听 S.M. George, B. Yoon, R.A. Hall, A.I. Abdulagatov, Z.M. Gibbs, Y. Lee, D. Seghete and B.H. Lee, "Molecular Layer Deposition of Hybrid Organic-Inorganic Films", Chapter 5 in Atomic Layer Deposition of Nanostructured Materials, edited by N. Pinna and M Knez (Wiley-VCH, Weinheim, Germany, 2012).

343.听听听听 Xiang Sun, Ming Xie, Gongkai Wang, Hongtao Sun, Andrew S. Cavanagh, Jonathan J. Travis, Steven George and Jie Lian, 鈥淎tomic Layer Deposition of TiO₂ on Graphene for Supercapacitors鈥�, J. Electrochem. Soc. 159, A364-A369 (2012). 听

342.听听听听 Paul Poodt, David C. Cameron, Eric Dickey, Steven M. George, Vladimir Kuznetsov, Gregory N. Parsons, Fred Roozeboom, Ganesh Sundaram and Ad Vermeer, 鈥淪patial Atomic Layer Deposition: A RouteTowards Further Industrialization of ALD鈥� J. Vac. Sci. Technol. A 30, 010802 (2012).

341.听听听听 P. Ryan Fitzpatrick, Zachary M. Gibbs and Steven M. George, 鈥淓valuating Operating Conditions for Continuous Atmospheric Atomic Layer Deposition using a Multiple Slit Gas Source Head鈥�, J. Vac. Sci. Technol. A 30, 01A136 (2012).

340.听听听听 Byoung H. Lee, Byunghoon Yoon, Virginia R. Anderson and Steven M. George, 鈥淎lucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al₂O₃ Atomic Layer Deposition鈥�, J. Phys. Chem. C. 116, 3250-3257 (2012).

339.听听听听 L. Wang, J.J. Travis, A.S. Cavanagh, X. Liu, S.P. Koenig, P.Y. Huang, S.M. George and J.S. Bunch, 鈥淯ltrathin Oxide Films by Atomic Layer Deposition on Graphene鈥�, Nano Letters 12, 3706-3710 (2012).听

338.听听听听 Y. Zhang, D. Seghete, A.I. Abdulagatov, Z.M. Gibbs, A.S. Cavanagh, R. Yang, S.M. George and Y.C. Lee, 鈥淚nvestigation of the Defect Density in Ultra-Thin Al₂O₃ Films Grown using Atomic Layer Deposition鈥�, Surf. Coat. Tech. 205, 3334-3339 (2011). 听

337.听听听听 Yoon Seok Jung, Andrew S. Cavanagh, Yanfa Yan, Steven M. George and Arumugam Manthiram, 鈥淓ffects of Atomic Layer Deposition of Al₂O₃ on the Li[Li_0.20Mn_0.54Ni_0.13Co_0.13]O₂ Cathode of Lithium-Ion Batteries鈥�, J. Electrochem. Soc. 158, A1298-A1302 (2011).

336.听听听听 A.I. Abdulagatov, Y. Yan, J.R Cooper, Y. Zhang, Z.M. Gibbs, A.S. Cavanagh, R.G. Yang, Y.C. Lee and S.M. George, 鈥淎l₂O₃ and TiO₂ Atomic Layer Deposition on Copper for Water Corrosion Resistance鈥�, ACS Appl. Mater. Interfaces 3, 4593-4601 (2011).

335.听听听听 Y. Zhang, R.G. Yang, S.M. George and Y.C. Lee, 鈥淚n-Situ Inspection of Cracking in Atomic-Layer-Deposited Barrier Films on Surface and in Buried Structures鈥�, Thin Solid Films 520, 251-257 (2011).听

334.听听听听 B. H. Lee, V. R. Anderson and S. M. George, 鈥淢etalcone and Metalcone/Metal Oxide Alloys Grown Using Atomic & Molecular Layer Deposition鈥�, ECS Transactions 41 (2) 131-138 (2011).听

333.听听听听 B. Yoon, B. H. Lee 听and S. M. George, 鈥淢olecular Layer Deposition of Flexible, Transparent and Conductive Hybrid Organic-Inorganic Thin 贵颈濒尘蝉鈥�, ECS Transactions 41 (2) 271-277 (2011).听

332.听听听听 Gregory N. Parsons, Steven M. George and Mato Knez, 鈥淧rogress and Future Directions for Atomic Layer Deposition and ALD-based Chemistry鈥�, MRS Bulletin 36, 865-871 (2011).

331.听听听听 Y. Lee, B. Yoon, A.S. Cavanagh and S.M. George, 鈥淢olecular Layer Deposition of Aluminum Alkoxide Polymer Films Using Trimethylaluminum and Glycidol鈥�, Langmuir 27, 15155-15164 (2011).

330.听听听听 S.M. George, B.H. Lee, B. Yoon, A.I. Abdulagatov and R.A. Hall, 鈥淢etalcones: Hybrid Organic-Inorganic Films Fabricated Using Atomic & Molecular Layer Deposition Techniques鈥�, J. Nanoscience & Nanotechnology 11, 7948-7955 (2011).听

329.听听听听 S.M. George, P.R. Fitzpatrick and Z.M. Gibbs, 鈥淎tomic Layer Deposition for Continuous Roll-to-Roll Processing鈥�, Summer Bulletin of the Society of Vacuum Coaters (SVC), pages 50-54 (2011).

328.听听听听 S.M. George, P.R. Fitzpatrick and Z.M. Gibbs, 鈥淎tomic Layer Deposition for Continuous Roll-to-Roll Processing鈥�, 54th Technical Conference Proceedings of the Society of Vacuum Coaters (SVC), 76-81 (2011).

327.听听听听 J.A. Bertrand and S.M. George, 鈥淎tomic Layer Deposition on Polymers for Ultralow Water Vapor Transmission Rates:听 The Ca Test鈥�, 54th Technical Conference Proceedings of the Society of Vacuum Coaters (SVC), 492-496 (2011).

326.听听听听 B.D. Davidson, D. Seghete, S.M. George and V.M. Bright, 鈥淎LD Tungsten NEMS Switches and Tunneling Devices鈥�, Sensors & Actuators A 166, 269-276 (2011).

325.听听听听 L.A. Riley, S.V. Atta, A.S. Cavanagh, Y. Yan, S.M. George, P. Liu, A.C. Dillon and S.H. Lee, 鈥淓lectrochemical Effects of ALD Surface Modification on Combustion Synthesized LiNi_1/3Mn_1/3Co_1/3O₂ as a Layered Cathode Material鈥�, J. Power Sources 196, 3317-3324 (2011).

324.听听听听 S.M. George, 鈥淗ybrid Organic-Inorganic Films Grown Using Molecular Layer Deposition鈥�, The Strem Chemiker, Vol. XXV, No. 1, March 2011 (Strem Chemicals, Inc., Newburyport, Massachusetts) pp. 13-26.

323.听听听听 E. Kang, Y.S. Jung, A.S. Cavanagh, G.H. Kim, S.M. George, A.C. Dillon, J.K. Kim and J. Lee, 鈥淔e₃O₄ Nanoparticles Confined in Mesocellular Carbon Foam for High Performance Anode Materials for Lithium-Ion Batteries鈥�, Adv. Funct. Mater. 21, 2430-2438 (2011).

322.听听听听 A.C. Dillon, L.A. Riley, Y.S. Jung, C. Ban, D. Molina, A.H. Mahan, A.S. Cavanagh, S.M. George and S.-H. Lee, 鈥淗WCVD MoO₃ Nanoparticles and a-Si for Next Generation Li-Ion Anodes鈥�, Thin Solid Films 519, 4495-4497 (2011).

321.听听听听 K. Leung, Y. Qi, K.R. Zavadil, Y.S. Jung, A.C. Dillon, A.S. Cavanagh; S.H. Lee, S.M. George, 鈥淯sing Atomic Layer Deposition to Hinder Solvent Decomposition in Lithium Ion Batteries: First Principles Modeling and Experimental Studies鈥�, J. Am. Chem. Soc. 133, 14741-14754 (2011).

320.听听听听 S.H. Jen, J.A. Bertrand and S.M. George, 鈥淐ritical Tensile and Compressive Strains for Cracking of Al₂O₃ Films Grown by Atomic Layer Deposition鈥�, J. Appl. Phys. 109, 084305 (2011).

319.听听听听 L. Baker, A.S. Cavanagh, D. Seghete, S.M. George, A.J.M. Mackus, W.M.M. Kessels, Z.Y. Liu and F.T. Wagner, 鈥淣ucleation and Growth of Pt Atomic Layer Deposition on Al₂O₃ Substrates Using (Methylcyclopentadienyl)-Trimethyl Platinum and O₂ 笔濒补蝉尘补鈥�, J. Appl. Phys. 109, 084333 (2011).

318.听听听听 B. Yoon, Y. Lee, A. Derk, C.B. Musgrave and S.M. George, 鈥淢olecular Layer Deposition of Conductive Hybrid Organic-Inorganic Thin Films Using Diethylzinc and Hydroquinone鈥�, ECS Transactions 33 (27) 191-195 (2011).

317.听听听听 D.N. Goldstein and S.M. George, "Surface Poisoning in the Nucleation and Growth of Palladium Atomic Layer Deposition with Pd(hfac)₂ and Formalin", Thin Solid Films 519, 5339-5347 (2011).

316.听听听听 D. Seghete, F.H. Fabreguette and S.M. George, 鈥淯sing a Slit Doser to Probe Gas Dynamics during Al₂O₃ Atomic Layer Deposition and to Fabricate Laterally Graded Al₂O₃ 尝补测别谤蝉鈥�, Thin Solid Films 519, 3612-3618 (2011).

315.听听听听 D. Seghete, G.B. Rayner, Jr., A.S. Cavanagh, V.R. Anderson and S.M. George, "Molybdenum Atomic Layer Deposition Using MoF₆ and Si₂H₆ as Reactants鈥�, Chem. Mater. 23, 1668-1678 (2011).

314.听听听听 L.A. Riley, A.S. Cavanagh, S.M. George, S.H. Lee and A.C. Dillon, 鈥淚mproved Mechanical Integrity of ALD-Coated Composite Electrodes for Li-Ion Batteries鈥�, Electrochem. Solid-State Lett. 14, A29-A31 (2011).

313.听听听听 I.D. Scott, Y.S. Jung, A.S. Cavanagh, Y. Yan, A.C. Dillon, S.M. George, S.H. Lee, 鈥淯ltrathin Coatings on Nano-LiCoO₂ for Li-Ion Vehicular Applications鈥�, Nano Letters 11, 414-418 (2011).听

312.听听听听 J.R. Montague, M. Dalberth, J.M. Grey, D. Seghete, K.A. Bertness, S.M. George, V.M. Bright, C.T. Rogers, N.A. Sanford, 鈥淎nalysis of High-Q Gallium Nitride Resonators in Response to Deposited Thin 贵颈濒尘蝉鈥�, Sensors and Actuators A 165, 59-65 (2011).

311.听听听听 J.H. Cheng, D. Seghete, M. Lee, J.B. Schlager, K.A. Bertness, N.A. Sanford, R. Yang, S.M. George and Y.C. Lee, 鈥淎tomic layer deposition enabled interconnect technology for vertical nanowire arrays鈥� Sensors and Actuators A 165, 107-114 (2011).

310.听听听听 D.C. Miller, R.R. Foster, S.H. Jen, J.A. Bertrand, S.J. Cunningham, A.S. Morris, Y.C. Lee, S.M. George and M.L. Dunn, 鈥淭hermo-mechanical Properties of Alumina Films Created Using the Atomic Layer Deposition Technique鈥�, Sensors and Actuators A 164, 58-67 (2010).

309.听听听听 L.A. Riley, A.S. Cavanagh, S.M. George, Y.S. Jung, Y. Yan, S.H. Lee and A.C. Dillon, 鈥淐onformal Surface Coatings to Enable High Volume Expansion Li-ion Anode Materials鈥�, ChemPhysChem. 11, 2124-2130 (2010).

308.听听听听 J.Y. Kim and S.M. George, 鈥淭in Monosulfide Thin Films Grown by Atomic Layer Deposition Using Tin 2,4-Pentanedionate and Hydrogen Sulfide, J. Phys. Chem. C 114, 17597-17603 (2010).

307.听听听听 S.K. Sarkar, J.Y. Kim, D.N. Goldstein, N.R. Neale, K. Zhu, C.M. Elliott, A.J. Frank and S.M. George, "In₂S₃ Atomic Layer Deposition and Its Application as a Sensitizer on TiO₂ Nanotube Arrays for Solar Energy Conversion", J. Phys. Chem. C 114, 8032-8039 (2010).听

306.听听听听听听 T.K. Minton, B. Wu, J. Zhang, N.F. Lindholm, A.I. Abdulagatov, J.L. O鈥橮atchen, S.M. George and M.D. Groner, 鈥淧rotecting Polymers in Space with Atomic Layer Deposition Coatings鈥�, ACS Appl. Mater. Interfaces 2, 2515-2520 (2010).

305.听听听听 D.J. Guo, A.I. Abdulagatov, D.M. Rourke, K.A. Bertness, S.M. George, Y.C. Lee and W. Tan, 鈥淕aN Nanowire Functionalized with Atomic Layer Deposition Techniques for Enhanced Immobilization of Biomolecules鈥�, Langmuir 26, 18382-18391 (2010).

304.听听听听 A.S. Cavanagh, Y. Lee, B. Yoon and S.M. George, "Atomic Layer Deposition of LiOH and Li₂CO₃ Using Lithium t-butoxide as the Lithium Source", in Atomic Layer Deposition Applications 6, edited by A. Londergan, J.W. Elam, O. van der Straten, S. De Gendt, S.F. Bent and S.B. Kang (The Electrochemical Society, Pennington, NJ, 2010); also ECS Transactions, 33 (2), 223-229 (2010).听

303.听听听听 N.A. Sanford, P.T. Blanchard, K.A. Bertness, L. Mansfield, J.B. Schlager, A.W. Sanders, A. Roshko, B.B. Burton and S.M. George, "Steady-State and Transient Photoconductivity in c-axis GaN Nanowires Grown by Nitrogen-Plasma-Assisted Molecular Beam Epitaxy", J. Appl. Phys. 107, 034318 (2010).

302.听听听听 D. Seghete, R.A. Hall, B. Yoon and S.M. George, "Importance of Trimethylaluminum Diffusion in Three-Step ABC Molecular Layer Deposition Using Trimethylaluminum, Ethanolamine and Maleic Anhydride鈥�, Langmuir 26, 19045-19051 (2010).

301.听听听听 Y.S. Jung, A.S. Cavanagh, A.C. Dillon, M.D. Groner, S.M. George and S.H. Lee, "Ultrathin Direct Atomic Layer Deposition on Composite Electrodes is Critical for Highly Durable and Safe Li-Ion Batteries ", Adv. Mater. 22, 2172-2176 (2010).

300.听听听听 S.M. George, "Atomic Layer Deposition:听 An Overview", Chem. Rev. 110, 111-131 (2010).

299.听听听听 Y.S. Jung, A.S. Cavanagh, A.C. Dillon, M.D. Groner, S.M. George and S.H. Lee, "Enhanced Stability of LiCoO₂ Cathodes in Lithium-ion Batteries Using Surface Modification by Atomic Layer Deposition", J. Electrochem. Soc. 157, A75-A81 (2010).听

298.听听听听 R.A. Wind and S.M. George, "Quartz Crystal Microbalance Studies of Al₂O₃ Atomic Layer Deposition Using Trimethylaluminum and Water at 125掳C", J. Phys. Chem. A 114, 1281-1289 (2010).

297.听听听听 D.C. Miller, R.R. Foster, S.H. Jen, J.A. Bertrand, D. Seghete, B. Yoon, Y.C. Lee, S.M. George and M.L. Dunn, "Thermo-Mechanical Properties of Aluminum Alkoxide (Alucone) Films Created Using Molecular Layer Deposition", Acta Mater. 57, 5083-5092 (2009).

296.听听听听 D.C. Miller, R.R. Foster, Y. Zhang, S.H. Jen, J.A. Bertrand, Z. Lu, D. Seghete, J.L. O'Patchen, R. Yang, Y.C. Lee, S.M. George and M.L. Dunn, "The Mechanical Robustness of Atomic Layer- and Molecular Layer-Deposited Coatings on Polymer Substrates", J. Appl. Phys. 105, 093527 (2009).

295.听听听听 D.N. Goldstein and S.M. George, "Enhancing the Nucleation of Palladium Atomic Layer Deposition Using Trimethylaluminum to Prevent Surface Poisoning by Reaction Products", Appl. Phys. Lett. 95, 143106 (2009).

294.听听听听 G.B. Rayner, Jr. and S.M. George, "Nucleation and Growth of Tantalum Nitride Atomic Layer Deposition on Al₂O₃ Using TBTDET and Hydrogen Radicals", J. Vac. Sci. Technol. A 27, 716-724 (2009).

293.听听听听 Y.J. Chang, J.M. Gray, A. Imtiaz, D. Seghete, T.M. Wallis, S.M. George, P. Kabos, C.T. Rodgers and V.M. Bright, "Micromachined Resonators of High Q-Factor Based on Atomic Layer Deposited Alumina", Sens. Actuators A 154, 229-237 (2009).

292.听听听听 B. Yoon, J.L. O'Patchen, D. Seghete, A.S. Cavanagh and S.M. George, "Molecular Layer Deposition of Hybrid Organic-Inorganic Polymer Films Using Diethylzinc and Ethylene Glycol", Chem. Vap. Deposition 15, 112-121 (2009).

291.听听听听 R.A. Wind, F.H. Fabreguette, Z.A. Sechrist and S.M. George, "Nucleation Period, Surface Roughness and Oscillations in Mass Gain per Cycle during W Atomic Layer Deposition on Al₂O₃", J. Appl. Phys. 105, 074309 (2009).

290.听听听听 S.M. George, B. Yoon and A.A. Dameron, "Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic-Inorganic Polymers", Acc. Chem. Res. 42, 498-508 (2009).

289.听听听听 B. Yoon, D. Seghete, A.S. Cavanagh and S.M. George, "Molecular Layer Deposition of Hybrid Organic-Inorganic Alucone Polymer Films Using a Three-Step ABC Reaction Sequence", Chem. Mater. 21, 5365-5374 (2009).

288.听听听听 Y. Zhang, Y.Z. Zhang, D.C. Miller, J.A. Bertrand, S.H. Jen, R. Yang, M.L. Dunn, S.M. George and Y. C. Lee, "Fluorescent Tags to Visualize Defects in Al₂O₃ Thin Films Grown Using Atomic Layer Deposition", Thin Solid Films 517, 6794-6797 (2009).

287.听听听听 Y. Zhang, J.A. Bertrand, R. Yang, S.M. George and Y. C. Lee, "Electroplating to Visualize Defects in Al₂O₃ Thin Films Grown Using Atomic Layer Deposition", Thin Solid Films 517, 3269-3272 (2009).

286.听听听听 P. F. Carcia, R.S. McLean, M. D. Groner, A. A. Dameron and S. M. George, Al₂O₃ ALD and SiN PECVD Films as Gas Diffusion Ultra-barrier on Polymer Substrates, J. Appl. Phys. 106, 023533 (2009).

285.听听听听 B.B. Burton, F.H. Fabreguette and S.M. George, "Atomic Layer Deposition of MnO Using Bis(ethylcyclopentadienyl)manganese and H₂O", Thin Solid Films 517, 5658-5665 (2009).

284.听听听听 B. B. Burton, S. W. Kang, S.W. Rhee and S.M. George, "SiO₂ Atomic Layer Deposition Using Tris(dimethylamino)silane and Hydrogen Peroxide Studied by in situ Transmission FTIR Spectroscopy", J. Phys. Chem. C 113, 8249-8257 (2009).

283.听听听听 A.S. Cavanagh, C.A. Wilson, A.W. Weimer and S.M. George, "Atomic Layer Deposition on Gram Quantities of Multiwalled Carbon Nanotubes", Nanotechnology 20, 255602 (2009).

282.听听听听 J.R. Scheffe, A. Franc茅s, D.M. King, X. Liang, B.A. Branch, A.S. Cavanagh, S.M. George and A.W. Weimer, "Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen", Thin Solid Films 517, 1874鈥�1879 (2009).

281.听听听听 D. Seghete, B.D. Davidson, R.A. Hall, Y.J. Chang, V.M. Bright and S.M. George, "Sacrificial Layers for Air Gaps in NEMS Using Alucone Molecular Layer Deposition", Sens. Actuators A听 155, 8-15 (2009).

280.听听听听 B.B. Burton, D.N. Goldstein and S.M. George, "Atomic Layer Deposition of MgO Using Bis(ethylcyclopentadienyl)magnesium and H₂O", J. Phys. Chem. C 113, 1939-1946 (2009).

279.听听听听 X. Liang, P. Li, S.M. George and A.W. Weimer, "Nanocoating Hybrid Polymer Films on Large Quantities of Cohesive Nanoparticles by Molecular Layer Deposition", AIChE J. 55, 1030-1039 (2009).

278.听听听听 D.N. Goldstein, J.A. McCormick and S.M. George, "Al₂O₃ Atomic Layer Deposition using Trimethylaluminum and Ozone Studied by in situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry", J. Phys. Chem. C 112, 19530-19539 (2008).

277.听听听听 N.F. Lindholm, J. Zhang, T.K. Minton, J.L. O鈥橮atchen, S.M. George and M.D. Groner, "Protection of Polymers from the Space Environment by Atomic Layer Deposition", Proceedings of the 9^th International Conference on the Protection of Materials in a Space Environment, Toronto, Canada, May 20-23, 2008.

276.听听听听 B.B. Burton, M.P. Boleslawski, A.T. Desombre and S.M. George, "Rapid SiO₂ Atomic Layer Deposition Using Tris(tert-pentoxy)silanol", Chem. Mater. 20, 7031-7043 (2008).

275.听听听听 S.M. George and B. Yoon, "Molecular Layer Deposition of Organic and Hybrid Organic-Inorganic Polymers", In Material Matters, Vol. 3, No. 2, "Nanoscale Surface Modification" (Aldrich Chemical Co., Inc., Milwaukee, WI, 2008) pp. 34-37.

274.听听听听 X. Du and S.M. George, "Thickness Dependence of Sensor Response for CO Gas Sensing by Tin Oxide Films Grown Using Atomic Layer Deposition", Sensors and Actuators B 135, 152-160 (2008).

273.听听听听 X. Du, Y. Du and S.M. George, "CO Gas Sensing by Ultrathin Tin Oxide Films Grown by Atomic Layer Deposition Using Transmission FTIR Spectroscopy", J. Phys. Chem. A 112, 9211-9219 (2008).

272.听听听听 A.A. Dameron, D. Seghete, B.B. Burton, S.D. Davidson, A.S. Cavanagh, J.A. Bertrand and S.M. George, "Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol", Chem. Mater. 20, 3315-3326 (2008).

271.听听听听 X. Liang, D.M. King, M.D. Groner, J.H. Blackson, J.D. Harris, S.M. George and A.W. Weimer, "Barrier Properties of Polymer/Alumina Nanocomposite Membranes Fabricated by Atomic Layer Deposition", J. Membrane Sci. 322, 105-112 (2008).

270.听听听听 B.B. Burton, A.R. Lavoie and S.M. George, "Tantalum Nitride Atomic Layer Deposition Using Tris(diethylamido)(tert-butylimido)tantalum and Hydrazine", J. Electrochem. Soc. 155, D508-D516 (2008).

269.听听听听 A.A. Dameron, S.D. Davidson, B.B. Burton, P.F. Carcia, R.S. McLean and S.M. George, "Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al₂O₃ and Rapid SiO₂ Atomic Layer Deposition", J. Phys. Chem. C 112, 4573-4580 (2008).

268.听听听听 N.M. Adamczyk, A.A. Dameron and S.M. George, "Molecular Layer Deposition of Poly(p-phenylene terephthalamide) Films Using Terephthaloyl Chloride and p-Phenylenediamine", Langmuir 24, 2081-2089 (2008).

267.听听听听 C.A. Wilson, D.N. Goldstein, J.A. McCormick, A.W. Weimer and S.M. George, "Tungsten Atomic Layer Deposition on Cobalt Nanoparticles", J. Vac. Sci. Technol. A 26, 430-437 (2008).

266.听听听听 L.L. Liu, O.M. Mukdadi, M.K. Tripp, C.F. Herrmann, J.R. Hertzberg, S. M. George, 听V.M. Bright and R. Shandas,听 "Atomic Layer Deposition for Fabricating Capacitive Micromachined Ultrasonic Transducers: Initial Characterization", Sensors and Materials 20, 15-34 (2008).

265.听听听听 C.A. Wilson, J.A. McCormick, A.S. Cavanagh, D.N. Goldstein, A.W. Weimer and S.M. George, "Tungsten Atomic Layer Deposition on Polymers", Thin Solid Films 516, 6175-6185 (2008).

264.听听听听 M.A. Weimer, M.D. Groner, L.F. Hakim, D.M. King, X. Liang, P. Li, S.M. George and A.W. Weimer, "Ultrafast Metal-Insulator Varistors Based Tunable Al₂O₃ Tunnel Junctions", Appl. Phys. Lett. 92, 164101 (2008).

263.听听听听 X. Liang, G.D. Zhan, D.M. King, J.A. McCormick, J. Zhang, S.M. George and A.W. Weimer, "Alumina Atomic Layer Deposition Nanocoatings on Primary Diamond Particles in a Fluidized Bed Reactor", Diam. Relat. Mater. 17, 185-189 (2008).听

262.听听听听 D.S. Finch, T. Oreskovic, K. Ramadurai, C.F. Herrmann, S.M. George and R.L. Mahajan, "Biocompatibility of Atomic Layer-Deposited Alumina Thin Films", J. Biomed. Mater. Res. A 听87A, 100-106 (2008).

261.听听听听 R. Cooper, H.P. Upadhyaya, T.K. Minton, M.R. Berman, X. Du and S.M. George, "Protection of Polymer from Atomic-Oxygen Erosion Using Al₂O₃ Atomic Layer Deposition Coatings", Thin Solid Films 516, 4036-4039 (2008).

260.听听听听 A.S. Cavanagh, C.A. Wilson, A.W. Weimer and S.M. George, "Atomic Layer Deposition on Quantities of Multiwalled Carbon Nanotubes", in Synthesis and Surface Engineering of Three-Dimensional Nanostructures, edited by Ruth Hourbertz (Mater. Res. Soc. Symp. Proc. Volume 1054E, Warrendale, PA, 2008), Paper #1054-FF03-10.听

259.听听听听 P.F. Carcia, R.S. McLean, M.D. Groner, A.A. Dameron and S.M. George, "Application of Atomic Layer Deposition for Gas Permeation Barrier Thin Films", Electrochemistry Society (ECS) Transactions 11(7), 15-21 (2007) in Atomic Layer Deposition Applications 3, edited by A. Londergan, J.W. Elam, O. van der Straten, S. De Gendt, S.F. Bent and S.B. Kang (The Electrochemical Society, Pennington, NJ, 2007).

258.听听听听 S.M. George, A.A. Dameron, Y. Du, N.M. Adamcyzk and S.D. Davidson, "Molecular Layer Deposition of Organic and Hybrid Organic-Inorganic Films", Electrochemistry Society (ECS) Transactions 11(7), 81-90 (2007) in Atomic Layer Deposition Applications 3, edited by A. Londergan, J.W. Elam, O. van der Straten, S. De Gendt, S.F. Bent and S.B. Kang (The Electrochemical Society, Pennington, NJ, 2007).

257.听听听听 X.H. Liang, S.M. George, A.W. Weimer, N.H. Li, J. Blackson, J. Harris and P. Li, "Synthesis of a Novel Porous Polymer/Ceramic Composite Material by Low-Temperature Atomic Layer Deposition", Chem. Mater. 19, 5388-5394 (2007).

256.听听听听 Y. Du and S.M. George, "Molecular Layer Deposition of Nylon 66 Films Examined Using In Situ FTIR Spectroscopy" J. Phys. Chem. C 111, 8509-8517 (2007).

255.听听听听 L.F. Hakim, D.M. King, Y. Zhou, C.J. Gump, S.M. George and A.W. Weimer, 鈥淣anoparticle Coating for Advanced Optical, Mechanical and Rheological Properties,鈥� Adv. Funct. Mater. 17, 3175-3181 (2007).

254.听听听听 F.H. Fabreguette and S.M. George, "X-Ray Mirrors on Flexible Polymer Substrates Fabricated by Atomic Layer Deposition" Thin Solid Films 515, 7177-7180 (2007).

253.听听听听 J.A. McCormick, K.P. Rice, D.F. Paul, A.W. Weimer and S.M. George, "Al₂O₃ Atomic Layer Deposition on ZrO₂ Nanoparticles in a Rotary Reactor" Chem. Vapor Depos. 13, 491-498 (2007).

252.听听听听 X.H. Liang, L.F. Hakim, G.D. Zhan, J.A. McCormick, S.M. George, A.W. Weimer, J.A. Spencer II, K.J. Buechler, J. Blackson, C.J. Wood and J.R. Dorgan,听 鈥淧olymer/Ceramic Nanocomposites Produced by Extruding ALD Nanocoated Polymer Particles,鈥澨� J. Am Ceram. Soc. 90, 57-63 (2007).听

251.听听听听 J.A. McCormick, B.L. Cloutier, A.W. Weimer and S.M. George, "Rotary Reactor for Atomic Layer Deposition on Large Quantities of Nanoparticles", J. Vac. Sci. Technol. A 25, 67-74 (2007).

250.听听听听 Y. Du, X. Du and S. M. George, "Mechanism of Pyridine-Catalyzed SiO₂ Atomic Layer Deposition Studied by Fourier Transform Infrared Spectroscopy", J. Phys. Chem. C 111, 219-226 (2007).

249.听听听听 D.C. Miller, C.F. Herrmann, H.J. Maier, S.M. George, C.R. Stoldt and K. Gall, "Thermo-Mechanical Evolution of Multilayer Thin Films, Part II:听 Microstructure Evolution in Au/Cr/Si Microcantilevers", Thin Solid Films 515, 3224-3240 (2007).

248.听听听听 D.C. Miller, C.F. Herrmann, H.J. Maier, S.M. George, C.R. Stoldt and K. Gall, "Thermo-Mechanical Evolution of Multilayer Thin Films, Part I:听 Mechanical Behavior of Au/Cr/Si Microcantilevers", Thin Solid Films 515, 3208-3223 (2007).

247.听听听听 C.F. Herrmann, F. W. DelRio, D.C. Miller, S.M. George, V.M. Bright, J.L. Ebel, R.E. Strawser, R. Cortez and K.D. Leedy, "Alternative Dielectric Films for RF MEMS Capacitive Switches Deposited Using Atomic Layer Deposited Al₂O₃/ZnO Alloys鈥�, Sensors and Actuators A 135, 262-272 (2007).

246.听听听听 L.F. Hakim, J.A. McCormick, G.D. Zhan, A.W. Weimer, P. Li and S.M. George, "Surface Modification of Titania Nanoparticles Using Ultrathin Ceramic Films", J. Am. Ceram. Soc. 89, 3070-3075 (2006).

245.听听听听 M.K. Tripp, C. Stampfer, D.C. Miller, T. Helbling, C.F. Herrmann, C. Hierold, K. Gall, S.M. George and V.M. Bright, "The Mechanical Properties of Atomic Layer Deposited Alumina for Use in Micro- and Nano-Electromechanical Systems", Sensors and Actuators A 130-131, 419-429 (2006).

244.听听听听 P.F. Carcia, R.S. McLean, M.H. Reilly, M.D. Groner and S.M. George, "Ca-Tests of Al₂O₃ Gas Diffusion Barriers Grown by Atomic Layer Deposition on Polymers", Appl. Phys. Lett. 89, 031915 (2006).

243.听听听听 Z.A. Sechrist, B.T. Schwartz, J.H. Lee, J.A. McCormick, R. Piestun, W. Park, and S.M. George, "Modification of Opal Photonic Crystals Using Al₂O₃ Atomic Layer Deposition", Chem. Mater. 18, 3562-3570 (2006).

242.听听听听 R.K. Grubbs and S.M. George, "Attenuation of Hydrogen Radicals Traveling under Flowing Gas Conditions Through Tubes of Different Materials ", J. Vac. Sci. Technol. A 24, 486-496 (2006).

241.听听听听 M.D. Groner, S.M. George, R.S. McLean and P.F. Carcia, "Gas Diffusion Barriers on Polymers Using Al₂O₃ Atomic Layer Deposition", Appl. Phys. Lett. 88, 051907 (2006).

240.听听听听 F.H. Fabreguette, R.A. Wind and S.M. George, "Ultra-high X-Ray Reflectivity from W/Al₂O₃ Multilayers Fabricated Using Atomic Layer Deposition", Appl. Phys. Lett. 88, 013116 (2006).

239.听听听听 M.D. Groner, S.M. George, R.S. McLean and P.F. Carcia, "Gas Diffusion Barriers on Polymers Using Al₂O₃ Atomic Layer Deposition", 48th Technical Conference Proceedings of the Society of Vacuum Coaters (SVC), pages 169-172 (2005).

238.听听听听 L.F. Hakim, J. Blackson, S.M. George and A.W. Weimer, "Nanocoating Individual Silica Nanoparticles by Atomic Layer Deposition in a Fluidized Bed Reactor", Chem. Vap. Deposition 11, 420-425 (2005).

237.听听听听 C.A. Wilson, R.K. Grubbs and S.M. George, "Nucleation and Growth during Al₂O₃ Atomic Layer Deposition on Polymers", Chem. Mater. 17, 5625-5634 (2005).

236.听听听听 Z.A. Sechrist, F.H. Fabreguette, O. Heintz, T.M. Phung, D.C. Johnson and S.M. George, "Optimization and Structural Characterization of W/Al₂O₃ Nanolaminates Grown Using Atomic Layer Deposition Techniques", Chem. Mater. 17, 3475-3485 (2005).

235.听听听听 J.D. Ferguson, K.J. Buechler, A.W. Weimer and S.M. George, "SnO₂ Atomic Layer Deposition on ZrO₂ and Al Nanoparticles:听 Pathway to Enhanced Thermite Materials", Powder Technology 156, 154-163 (2005).

234.听听听听 M.J. Pellin, P.C. Stair, G. Xiong, J.W. Elam, J. Birrell, L. Curtiss, S.M. George, C.Y. Han, L. Iton, H. Kung, M. Kung and H.H. Wang, "Mesoporous Catalytic Membranes:听 Synthetic Control of Pore Size and Wall Composition", Catalysis Letters 102, 127-130 (2005).

233.听听听听 L.F. Hakim, S.M. George and A.W. Weimer, "Conformal Nanocoating of Primary Zirconia Nanoparticles by Atomic Layer Deposition in a Fluidized Bed Reactor", Nanotechnology 16, S375-S381 (2005).

232.听听听听 C.F. Herrmann, F.H. Fabreguette, D.S. Finch, R. Geiss and S.M. George, "Multilayer and Functional Coatings on Carbon Nanotubes Using Atomic Layer Deposition", Appl. Phys. Lett. 87, Art. No. 123110 (2005).听

231.听听听听 D.C. Miller, C.F. Herrmann, H.J. Maier, S.M. George, C.R. Stoldt and K. Gall, "Intrinsic Stress Development and Microstructure Evolution of Au/Cr/Si Multilayer Thin Films Subject to Annealing", Scripta Materialia 52, 873-879 (2005).

230.听听听听 X. Du, Y. Du and S.M. George, 鈥淚n Situ Examination of Tin Oxide Atomic Layer Deposition Using QCM and FTIR Techniques鈥�, J. Vac. Sci. Technol. A 23, 581-588 (2005).

229.听听听听 M.K. Tripp, F.H. Fabreguette, C.H. Herrmann, S.M. George and V.M. Bright, "Multilayer Coating Technique to Enhance X-Ray Reflectivity of Polysilicon Micro-Mirrors at 1.54 脜 Wavelength", Proceedings of SPIE 5720, 241-251 (2005).

228.听听听听 C.F. Herrmann, F.W. DelRio, S.M. George and V.M. Bright, "Properties of Atomic Layer Deposited Al₂O₃/ZnO Dielectric Films Grown at Low Temperature for RF MEMS", Proceedings of SPIE 5715, 159-166 (2005).听

227.听听听听 Y. Du, X. Du and S.M. George, 鈥淪iO₂ Film Growth at Low Temperatures by Catalyzed Atomic Layer Deposition in a Viscous Flow Reactor鈥�, Thin Solid Films 491, 43-53 (2005).

226.听听听听 C.F. Herrmann, F.W. DelRio, V.M. Bright and S.M. George, 鈥淐onformal Hydrophobic Coatings Prepared Using Atomic Layer Deposition Seed Layers and Non-Chlorinated Hydrophobic Precursors鈥�, J. Micromech. Microeng. 15, 984-992 (2005).

225.听听听听 F.H. Fabreguette, Z.A. Sechrist, J.W. Elam and S.M. George, 鈥淨uartz Crystal Microbalance Study of Tungsten Atomic Layer Deposition using WF₆ and Si₂H₆鈥�, Thin Solid Films 488, 103-110 (2005).

224.听听听听 J.D. Ferguson, A.W. Weimer and S.M. George, 鈥淪urface Chemistry and Infrared Absorbance Changes during ZnO Atomic Layer Deposition on ZrO₂ and BaTiO₃ 笔补谤迟颈肠濒别蝉鈥�, J. Vac. Sci. Technol. A 23, 118-125 (2005).

223.听听听听 S.W. Kang, S.W. Rhee and S.M. George, 鈥淚nfrared Spectroscopic Study of Atomic Layer Deposition (ALD) Mechanism for Hafnium Silicate Thin Films Using HfCl₂[N(SiMe₃)₂] and H₂翱鈥�,听 J. Vac. Sci. Technol. A 22, 2392-2397 (2004).

222.听听听听 Y. Zhang, M.L. Dunn, K. Gall, J.W. Elam and S.M. George, 鈥淪uppression of Inelastic Deformation of Nanocoated Thin Film Microstructures鈥�, J. Appl. Phys. 95, 8216-8225 (2004).

221.听听听听 J.R. Wank, S.M. George and A.W. Weimer, 鈥淣anocoating Individual Cohesive Boron Nitride Particles in a Fluidized Bed by ALD鈥�, Powder Technology 142, 59-69 (2004).听

220.听听听听 J.R. Wank, S.M. George and A.W. Weimer, 鈥淐oating Fine Nickel Particles with Al₂O₃ Utilizing an Atomic Layer Deposition-Fluidized Bed Reactor (ALD-FBR)鈥�, J. Am. Ceramic Soc. 87, 762-765 (2004).听

219.听听听听 J.D. Ferguson, A.W. Weimer and S.M. George, "Atomic Layer Deposition of Al₂O₃ Films on Polyethylene Particles", Chem. Mater. 16, 5602-5609 (2004).

218.听听听听 R.M. Costescu, D.G. Cahill, F.H. Fabreguette, Z.A. Sechrist and S.M. George, " Ultra-Low Thermal Conductivity in W/Al₂O₃ Nanolaminates", Science 303, 989-990 (2004).

217.听听听听 R.K. Grubbs, N.J. Steinmetz and S.M. George, "Gas Phase Reaction Products during Tungsten Atomic Layer Deposition Using WF₆ and Si₂H₆", J. Vac. Sci. Technol. B 22, 1811-1821 (2004).

216.听听听听 J.D. Ferguson, E.R. Smith, A.W. Weimer and S.M. George, 鈥淎tomic Layer Deposition of SiO₂ at Room Temperature using TEOS and H₂O with NH₃ as the Catalyst鈥�, J. Electrochem. Soc. 151, G528-G535 (2004).

215.听听听听 M.D. Groner, F.H. Fabreguette, J.W. Elam and S.M. George, 鈥淟ow Temperature Al₂O₃ Atomic Layer Deposition鈥�, Chem. Mater. 16, 639-645 (2004).

214.听听听听 R.K. Grubbs, J.W. Elam, C.E. Nelson and S.M. George, "Nucleation and Growth During Tungsten ALD on Al2O3听Surfaces and Al₂O₃ ALD on Tungsten Surfaces", Thin Solid Films 467, 16-27 (2004).

213.听听听听 J.D. Ferguson, A.R. Yoder, A.W. Weimer and S.M. George, 鈥淭iO₂ Atomic Layer Deposition on ZrO₂ Particles Using Alternating Exposures of TiCl₄ and H₂翱鈥�, Appl. Surf. Sci. 226, 393-404 (2004).

212.听听听听 K. Gall, M. L. Dunn, M. Hulse, D. Finch and S. M. George, "Effect of Al₂O₃ Nanocoatings on the Thermo-Mechanical Behavior of Au/Si MEMS Structures", Conference Proceedings of the IEEE International Reliability Physics Symposium, Dallas, Texas, March 30-April 4, 2003, pp. 463-472.

211.听听听听 M.N. Rocklein and S.M. George, "Temperature-Induced Apparent Mass Changes Observed during Quartz Crystal Microbalance Measurements of Atomic Layer Deposition", Anal. Chem. 75, 4975-4982 (2003).听

210.听听听听 J.W. Elam, D. Routkevitch, P.P. Markilovich and S.M. George, 鈥淐onformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition鈥�, Chem. Mater. 15, 3507-3517 (2003).听

209.听听听听 M.D. Groner and S.M. George, "High-k Dielectrics Grown by Atomic Layer Deposition:听 Capacitor and Gate Applications"听 Chapter 10 in Interlayer Dielectrics for Semiconductor Technologies.听 S.P. Murarka, M. Eizenbert and A.K. Sinha, Eds., (Elsevier Academic Press, Amsterdam, 2003) pp. 327-348.

208.听听听听 T.M. Mayer, J.W. Elam, S.M. George and P.G. Kotula, "Atomic Layer Deposition of Wear-Resistant Coatings for Micromechanical Devices", Appl. Phys. Lett. 82, 2883-2885 (2003).听

207.听听听听 J.W. Elam, C.A. Wilson, M.Schuisky, Z.A. Sechrist and S.M. George, "Improved Nucleation on TiN ALD Films on SiLK Low-k Polymer Dielectric Using an Al₂O₃ ALD Adhesion Layer", J. Vac. Sci. Technol. B 21, 1099-1107 (2003).

206.听听听听 J.W. Elam, M. Schuisky, J.D. Ferguson and S.M. George, "Surface Chemistry and Film Growth During TiN Atomic Layer Deposition using TDMAT and NH₃", Thin Solid Films 436, 145-156 (2003).

205.听听听听 J.A. Smith, F.E. Livingston and S.M. George, "Isothermal Desorption Kinetics of Crystalline H₂O, H₂¹⁸O and D₂O Ice Multilayers", J. Phys. Chem. B 107, 3871-3877 (2003).听

204.听听听听 K. Gall, M. Hulse, M.L. Dunn, D. Finch, S.M. George and B.A. Corff, "Thermo-Mechanical Response of Bare and Al₂O₃ Nanocoated Au/Si Bilayer Beams for MEMS", J. Mater. Res. 18, 1575-1587 (2003).听

203.听听听听 J.W. Elam, D. Routkevitch and S.M. George, "Properties of ZnO/Al2O3听Alloy Films Grown Using Atomic Layer Deposition Techniques", J. Electrochem. Soc. 150, G339-G347 (2003).

202.听听听听 J.W. Elam and S.M. George, "Growth of ZnO/Al₂O₃ Alloy Films Using Atomic Layer Deposition", Chem. Mater. 15, 1020-1028 (2003).

201.听听听听 N.D.Hoivik, J.W. Elam, R.J. Linderman, V.M. Bright, S.M. George and Y.C. Lee, "Atomic Layer Deposited Protective Coatings for Micro-Electromechanical Systems", Sensor Actuat. A 103, 100-108 (2003).听

200.听听听听 Y. Zhang, M.L. Dunn, J.W. Elam and S.M. George, "Suppression of Stress Relaxation in MEMS Multilayer Film Microstructures by Use of ALD Nanocoatings", Proceedings of IMECE'02, 2002 ASME International Mechanical Engineering Congress & Exposition, New Orleans, Lousiana, November 17-2002.听

199.听听听听 J.W. Elam, Z.A. Sechrist and S.M. George, "Atomic Layer Deposition of ZnO/Al₂O₃ Nanolaminates and Alloys:听 Fabrication and Properties",听 Proceedings of CIMTEC 2002, International Conferences on Modern Materials and Technologies, Florence, Italy, July 14-18, 2002.听

198.听听听听 N.D. Hoivik, J.W. Elam, S.M. George, K.C. Gupta, V.M. Bright and Y.C. Lee, "Atomic Layer Deposition (ALD) Technology for Reliable RF MEMS", in Proceedings of the IEEE MTT-S 2002 International Microwave Symposium, Seattle, WA, 2-7 June 2002, Symposium Digest, pp. 1229-1232.听

197.听听听听 M. Schuisky, J.W. Elam and S.M. George, "In Situ Resistivity Measurements During the Atomic Layer Deposition of ZnO and W Thin Films", Appl. Phys. Lett. 81, 180-182 (2002).听

196.听听听听 J.M. Jensen, A.B. Oelkers, R. Toivola, D.C. Johnson, J.W. Elam and S.M. George, "X-ray Reflectivity Characterization of ZnO/Al₂O₃ Multilayers Prepared Using Atomic Layer Deposition", Chem. Mater. 14, 2276-2282 (2002).

195.听听听听 M.D. Groner, J.W. Elam, F.H. Fabreguette and S.M. George, "Electrical Characterization of Thin Al₂O₃ Films Grown by Atomic Layer Deposition on Silicon and Various Metal Substrates", Thin Solid Films 413, 186-197 (2002).

194.听听听听 J.W. Elam, Z.A. Sechrist and S.M. George, "ZnO/Al₂O₃ Nanolaminates Fabricated by Atomic Layer Deposition:听 Growth and Surface Roughness Measurements", Thin Solid Films 414, 43-55 (2002).

193.听听听听 J.W. Elam, M.D. Groner and S.M. George, "Viscous Flow Reactor with Quartz Crystal Microbalance for Thin Film Growth by Atomic Layer Deposition", Rev. Sci. Instrum. 73, 2981-2987 (2002).听

192.听听听听 J.D. Ferguson, A.W. Weimer and S.M. George, "Atomic Layer Deposition of Boron Nitride Using Sequential Exposures of BCl₃ and NH₃", Thin Solid Films 413, 16-25 (2002).

191.听听听听 F.E. Livingston, J.A. Smith and S.M. George, "General Trends for Bulk Diffusion in Ice and Surface Diffusion on Ice", J. Phys. Chem. A 106, 6309-6318 (2002).

190.听听听听 F.E. Livingston and S.M. George, "Effects of Sodium on HCl Hydrate Diffusion in Ice:听 Evidence for Anion-Cation Trapping", J. Phys. Chem. A 106, 5114-5119 (2002).

189.听听听听 F.E. Livingston, S.M. George and R.K. Shori, "Optimization of a Rotary Q-Switched Er:YAG Laser", Rev. Sci. Instr. 73, 2526-2532 (2002).

188.听听听听 J.R. Wank, S.M. George, and A.W. Weimer, 鈥淐onformal Ultrathin Non-conducting coatings on Conducting Fine Metal Particles,鈥� Proceedings of the 2002 International Conference on Functionally Graded Materials 听(Metal Powder Industries Federation, Princeton, New Jersey, 2002) pp. 26-33.

187.听听听听 Wank, J.R, A.W. Weimer, J.D. Ferguson, and S.M. George, 鈥淐onformal Encapsulation of Fine Boron Niride Particles with Oxide Nanolayers,鈥� in Functionally Graded Materials 2000, K. Trumble, K. Bowman, I. Reimanis, and S. Sampath, editors (The American Ceramic Society, Westerville, Ohio, 2001), Ceram. Trans. 114, 441-449 (2001).

186.听听听听 S.M. George, J.W. Elam, R.K. Grubbs and C.E. Nelson, "Nucleation and Growth During Tungsten Atomic Layer Deposition on Oxide Surfaces", in Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures,听 Mat. Res. Soc. Sym. Proc. 672, O7.7.1-O7.7.7 (2001).

185.听听听听 J.R. Wank, S.M. George and A.W. Weimer, "Vibro-fluidization of Fine Boron Nitride Powder at Low Pressure", Powder Technology 121, 195-204 (2001).

184.听听听听 F.E. Livingston and S.M. George, "Diffusion Kinetics of HCl Hydrates in Ice Measured Using Infrared Laser Resonant Desorption Depth-Profiling", J. Phys. Chem. A 105, 5155-5164 (2001).

183.听听听听 J.W. Elam, C.E. Nelson, R.K. Grubbs and S.M. George, "Kinetics of the WF6听and Si2H6听Surface Reactions During Tungsten Atomic Layer Deposition", Surf. Sci. 479, 121-135 (2001).

182.听听听听 J.W. Elam, C.E. Nelson, R.K. Grubbs and S.M. George, "Nucleation and Growth During Tungsten Atomic Layer Deposition on SiO2听Surfaces", Thin Solid Films 386, 41-52 (2001).

181.听听听听 P.K. Hudson, K.L. Foster, M.A. Tolbert, S.M. George, S.R. Carlo and V.H. Grassian, "HBr Uptake on Ice:听 Uptake Coefficient, H2O/HBr Hydrate Formation and H2O Desorption Kinetics", J. Phys. Chem. A 105, 694-702 (2001).

180.听听听听 C.E. Nelson, J.W. Elam, M.A. Tolbert and S.M. George, "H2O and HCl Adsorption on Single-Crystal a-Al2O3(0001) at Stratospheric Temperatures", Applied Surface Science 171, 21-33 (2001).

179.听听听听 F.E. Livingston, J.A. Smith and S.M. George, "Depth-Profiling and Diffusion Measurements in Ice Films Using Infrared Laser Resonant Desorption", Anal. Chem. 72, 5590-5599 (2000).

178.听听听听 S.M. George, J.D. Ferguson and J.W. Klaus, "Atom Layer Deposition of Thin Films Using Sequential Surface Reactions", in New Methods, Mechanisms and Models of Vapor Deposition, Mat. Res. Soc. Sym. Proc. 616, 93-101 (2000).

177.听听听听 J.D. Ferguson, A.W. Weimer and S.M. George, "Atomic Layer Deposition of SiO2听Films on BN Particles Using Sequential Surface Reactions", Chem. Mater. 12, 3472-3480 (2000).

176.听听听听 M.A. Cameron, I.P. Gartland, J.A. Smith, S.F. Diaz and S.M. George, "Atomic Layer Deposition of SiO2听and TiO2听in Alumina Tubular Membranes:听 Pore Reduction and Effect of Surface Species on Gas Transport", Langmuir 16, 7435-7444 (2000).

175.听听听听 J.D. Ferguson, A.W. Weimer and S.M. George, "Atomic Layer Deposition of Ultrathin and Conformal Al2O3听Films on BN Particles", Thin Solid Films 371, 95-104 (2000).

174.听听听听 J.W. Elam, C.E. Nelson, M.A. Tolbert and S.M. George, "Adsorption and Desorption of HCl on a Single-Crystal a-Al2O3(0001) Surface", Surf, Sci. 450, 64-77 (2000).

173.听听听听 J.W. Klaus, S.J. Ferro and S.M. George, "Atomically Controlled Growth of Tungsten and Tungsten Nitride Using Sequential Surface Reactions", Appl. Surf. Sci. 162-163, 479-491 (2000).

172.听听听听 J.W. Klaus, S.J. Ferro and S.M. George, "Atomic Layer Deposition of Tungsten Using Sequential Surface Chemistry with a Sacrificial Stripping Reaction", Thin Solid Films 360, 145-153 (2000).

171.听听听听 J.W. Klaus and S.M. George, "SiO2听Chemical Vapor Deposition at Room Temperature Using SiCl4听+ H2O with a NH3听Catalyst", J. Electrochem. Soc. 147, 2658-2664 (2000).

170.听听听听 J.W. Klaus and S.M. George, "Atomic Layer Deposition of SiO2听at Room Temperature Using NH3-Catalyzed Sequential Surface Reactions", Surf. Sci. 447, 81-90 (2000).

169.听听听听 J.W. Klaus, S.J. Ferro and S.M. George, "Atomic Layer Deposition of Tungsten Nitride Films Using Sequential Surface Reactions", J. Electrochem. Soc. 147, 1175-1181 (2000).

168.听听听听 J.D. Ferguson, A.W. Weimer and S.M. George, "Atomic Layer Deposition of Al2O3听and SiO2听on BN Particles Using Sequential Surface Reactions", Appl. Surf. Sci. 162-163, 280-292 (2000).